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Ultrapure Water Technology - nanoparticle free water for the advanced nanoelectronics industry enabling further miniaturization of electronic devices

Leistungen

Demonstrator 400 l/h v.02 for evaluation at imec

Demonstrator 400 l/h v.02 for evaluation at imec

Final full-scale demonstrator 400l/h

Final full-scale demonstrator 400l/h

Pilot 40 l/h v.01 for evaluation at imec

Pilot 40 l/h v.01 for evaluation at imec

Veröffentlichungen

Experimental investigation and techno-economic analysis of tetramethylammonium hydroxide removal from wastewater in nano-electronics manufacturing via membrane distillation

Autoren: Imtisal-e- Noor, Jan Coenen, Andrew Martin, Olli Dahl, Miriam Åslin
Veröffentlicht in: Journal of Membrane Science, Issue 579, 2019, Page(s) 283-293, ISSN 0376-7388
DOI: 10.1016/j.memsci.2019.02.067