CORDIS
EU research results

CORDIS

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Copper Interconnects for Advanced Performance and Reliability

Project information

Grant agreement ID: 216474

Status

Closed project

  • Start date

    1 January 2008

  • End date

    30 November 2010

Funded under:

FP7-ICT

  • Overall budget:

    € 4 692 486

  • EU contribution

    € 3 150 000

Coordinated by:

TECHNIKON FORSCHUNGS- UND PLANUNGSGESELLSCHAFT MBH

Austria

Project description

Next-Generation Nanoelectronics Components and Electronics Integration The objective of CopPeR was to develop a seed-less copper deposition process and 300 mm wafer prototype equipment for sub-32 nm semiconductor interconnect manufacturing.

Coordinator

TECHNIKON FORSCHUNGS- UND PLANUNGSGESELLSCHAFT MBH

Address

Burgplatz 3a
9500 Villach

Austria

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

EU Contribution

€ 251 016

Administrative Contact

Klaus-Michael KOCH (Dr.)

Participants (7)

LAM RESEARCH AG

Austria

EU Contribution

€ 779 351

TECHNISCHE UNIVERSITAET GRAZ

Austria

EU Contribution

€ 525 452

ELSYCA NV

Belgium

EU Contribution

€ 359 502

KATHOLIEKE UNIVERSITEIT LEUVEN

Belgium

EU Contribution

€ 641 930

VRIJE UNIVERSITEIT BRUSSEL

Belgium

EU Contribution

€ 158 841

INFINEON TECHNOLOGIES AG

Germany

EU Contribution

€ 245 918

CORMET OY

Finland

EU Contribution

€ 187 990

Project information

Grant agreement ID: 216474

Status

Closed project

  • Start date

    1 January 2008

  • End date

    30 November 2010

Funded under:

FP7-ICT

  • Overall budget:

    € 4 692 486

  • EU contribution

    € 3 150 000

Coordinated by:

TECHNIKON FORSCHUNGS- UND PLANUNGSGESELLSCHAFT MBH

Austria