Copper Interconnects for Advanced Performance and Reliability

Project description

Next-Generation Nanoelectronics Components and Electronics Integration
The objective of CopPeR was to develop a seed-less copper deposition process and 300 mm wafer prototype equipment for sub-32 nm semiconductor interconnect manufacturing.

Fields of science

• natural sciences › chemical sciences › inorganic chemistry › transition metals

Programme(s)

• FP7-ICT - Specific Programme "Cooperation": Information and communication technologies

Topic(s)

• ICT-2007.3.1 - Next-generation nanoelectronic components and electronics integration

Call for proposal

FP7-ICT-2007-1
See other projects for this call

Funding Scheme

CP - Collaborative project (generic)

Coordinator

TECHNIKON FORSCHUNGS- UND PLANUNGSGESELLSCHAFT MBH

Address

Burgplatz 3a
9500 Villach
Austria

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

Administrative Contact

Klaus-Michael KOCH (Dr.)

Links

EU contribution

€ 251 016

Participants (7)

LAM RESEARCH AG

Austria

EU contribution

€ 779 351

Address

Sez-strasse 1
9500 Villach

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

Administrative Contact

Fritz Pertl (Mr.)

Links

TECHNISCHE UNIVERSITAET GRAZ

Austria

EU contribution

€ 525 452

Address

Rechbauerstrasse 12
8010 Graz

Activity type

Higher or Secondary Education Establishments

Administrative Contact

Gerald Kothleitner (Prof.)

Links

ELSYCA NV

Belgium

EU contribution

€ 359 502

Address

Vaartdijk 3 Bus 603
3018 Wijgmaal

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

Administrative Contact

Tania Van Cauwenberghe (Ms)

Links

KATHOLIEKE UNIVERSITEIT LEUVEN

Belgium

EU contribution

€ 641 930

Address

Oude Markt 13
3000 Leuven

Activity type

Higher or Secondary Education Establishments

Administrative Contact

Marion Wolpers (Ms)

Links

VRIJE UNIVERSITEIT BRUSSEL

Belgium

EU contribution

€ 158 841

Address

Pleinlaan 2
1050 Brussel

Activity type

Higher or Secondary Education Establishments

Administrative Contact

Martina Follet (Ms.)

Links

INFINEON TECHNOLOGIES AG

Germany

EU contribution

€ 245 918

Address

Am Campeon 1-15
85579 Neubiberg

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

Administrative Contact

Bernhard Scholz (Mr)

Links

CORMET OY

Finland

EU contribution

€ 187 990

Address

Luutnantintie 3 A
00410 Helsinki

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

Administrative Contact

Juha Piippo (Dr.)

Links