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Content archived on 2024-05-18

Development of micro-opto-electro-mechanical-systems on CMOS- substrates

Fields of science (EuroSciVoc)

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Topic(s)

Data not available

Call for proposal

IHP-MCHD-99-1
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Funding Scheme

Data not available

Coordinator

INSTITUT FUER MIKROELEKTRONISCHE SCHALTUNGEN UND SYSTEME - IMS DUISBURG
EU contribution
No data
Address
Finkenstrasse 61
DUISBURG
Germany
Total cost
No data