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Sub-micron and nanometre metrology for automated processes

Invitation to submit proposals to the research and development programme on applied metrology and chemical analysis (BCR) for coordinated activities on sub-micron as well as nanometre metrology for automated manufacturing processes.

Invitation to submit proposals to the research and development programme on applied metrology and chemical analysis (BCR) for coordinated activities on sub-micron as well as nanometre metrology for automated manufacturing processes.Information from: Commission of the European Communities, DG XII Community Bureau of Reference 200 rue de la Loi B-1049 Brussels Tel. +32-2-2359313; Telex 21877 COMEU B; Fax +32-2-2358072