Sub-micron and nanometre metrology for automated processes
Invitation to submit proposals to the research and development programme on applied metrology and chemical analysis (BCR) for coordinated activities on sub-micron as well as nanometre metrology for automated manufacturing processes.Information from: Commission of the European Communities, DG XII Community Bureau of Reference 200 rue de la Loi B-1049 Brussels Tel. +32-2-2359313; Telex 21877 COMEU B; Fax +32-2-2358072