Objective
Technology-computer-aided design (TCAD) is an indispensable tool for development and optimization of new generations of electronic devices in industrial environments. It was estimated in the International Technology Roadmap for Semiconductors that TCAD reduces technology development costs by 35% with a tendency to rise. However, to continue to be that useful for the 32 nm technology node and beyond, the capabilities of TCAD have to follow the paradigm shifts to processes and materials considered for such nanodevices.
The objective of this project is to extend the capabilities of TCAD to the materials and doping processes used at the 32 nm node and beyond. In particular, quantitative models for the deactivation and activation mechanisms for dopants in silicon will be developed which are suited for the low ion implantation energies and low-temperature or millisecond-annealing strategies of future nanodevices. These models will be able to predict the effects of point-defect engineering and, for boron, the influence of fluorine. For strained and unstrained silicon-germanium alloys, strained silicon, and silicon-on-insulator materials, models will be developed for the evolution of extended defects and for the activation, segregation, and diffusion of dopants. Special test structures will also be used to investigate a possible diffusion anisotropy in isolated semiconductor layers. The models developed will be implemented and integrated into FLOOPS-ISE to be of immediate value to the semiconductor industry and validated with respect to their needs.
To reach these ambitious goals, the consortium consists of companies active in complementary fields of competence (STM-France: device manufacturing, Mattson: equipment production, Synopsys: TCAD software, CSMA: characterization) in addition to three leading European research institutes (Fraunhofer-IISB, Univ. Surrey, CNRS-LAAS/CEMES) with extensive experience in modeling and simulation.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences computer and information sciences software
- natural sciences physical sciences electromagnetism and electronics semiconductivity
- natural sciences chemical sciences inorganic chemistry halogens
- natural sciences chemical sciences inorganic chemistry metalloids
You need to log in or register to use this function
Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Data not available
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
79108 MÜNCHEN
Germany
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.