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Development of New digital Microphone-MEMS-Sensors for wind tunnels with open/closed test sections and flight tests

Deliverables

PEDR

The plan for dissemination communication and exploitation of the results

Publications

Signal conditioning design for aero-acoustic piezoelectric MEMS microphone arrays

Author(s): José A. García-Souto, Javier Lázaro-Fernández, Pablo Acedo
Published in: 2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2022, ISBN 978-1-6654-9167-9
Publisher: IEEE
DOI: 10.1109/dtip56576.2022.9911756

Design and modeling of a novel piezoresistive microphone for aero acoustic measurements in laminar boundary layers using FEM and LEM

Author(s): Kolja J. Erbacher, Ha Duong Ngo, Piotr Mackowiak, Lixiang Wu, Emmanuel Julliard, Carsten Spehr
Published in: AIAA SciTech 2022 Forum, 2021
Publisher: AIAA
DOI: 10.2514/6.2022-1023

Piezoelectric MEMS for acoustic and ultrasonic applications

Author(s): Lixiang Wu; Tingzhong Xu; Javad Abbaszadeh; Mohssen Moridi
Published in: 2022 IEEE International Symposium on Applications of Ferroelectrics (ISAF) Proceedings, 2022, ISBN 978-1-6654-4841-3
Publisher: IEEE
DOI: 10.1109/isaf51494.2022.9870162

Aero Acoustic MEMS Microphone Integration in Ultra-Thin and Flexible Substrate

Author(s): Kolja Erbacher; Joao Alves Marques; Malte von Krshiwoblozki; Lixiang Wu; Ha Duong Ngo; Martin Schneider-Ramelow
Published in: 2022 IEEE 24th Electronics Packaging Technology Conference (EPTC), 2022
Publisher: IEEE
DOI: 10.1109/eptc56328.2022.10013281

Characterization of a Piezo-Resistive MEMS Microphone for Aero-Acoustic Measurements

Author(s): Kolja Erbacher, Onteru Lokesh, Claire Bourquard, Lixiang Wu, Piotr Mackowiak, Ha Duong Ngo, Martin Schneider-Ramelow
Published in: 2023 Sensor and Measurement Science International (SMSI) Proceedings, 2023, Page(s) 171-172, ISBN 978-3-9819376-8-8
Publisher: AMA Association for Sensors Measurement
DOI: 10.5162/smsi2023/c4.4

Design of dual-frequency piezoelectric MEMS microphones for wind tunnel testing

Author(s): Lixiang Wu, Xuyuan Chen, Ha Duong Ngo, Emmanuel Julliard, Carsten Spehr
Published in: AIAA SciTech 2022 Forum, 2021
Publisher: AIAA
DOI: 10.2514/6.2022-1021

Dual-frequency piezoelectric MEMS microphones based on AlSc30%N thin films for aeroacoustic measurements

Author(s): Lixiang Wu, Yanfen Zhai, Onteru Lokesh, Claire Bourquard, Javad Abbaszadeh, Nikolai Andrianov, Jose A. Garcia Souto, Thai Anh Tuan Nguyen, Xuyuan Chen, Kolja Erbacher, Ha-Duong Ngo, Olivier Sainges and Emmanuel Julliard
Published in: AIAA AVIATION 2023 Forum, 2023
Publisher: American Institute of Aeronautics and Astronautics, Inc.
DOI: 10.2514/6.2023-4391

Electronics design of piezo-resistive MEMS microphone arrays for aero-acoustics in flight test

Author(s): José A. García-Souto, Cindy Báez, Kolja J. Erbacher, Pablo Carrillo-Agudo, Ha Duong Ngo, Pablo Acedo
Published in: 2023 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2023
Publisher: IEEE
DOI: 10.1109/dtip58682.2023.10267950

Electronics for piezoelectric MEMS microphone arrays applied to aero-acoustic characterization ofstructures in wind tunnel tests

Author(s): Cindy A. Baez-Rivera, Jose A. Garcia Souto, Paula Cavarischia-Rega, Pablo Acedo
Published in: 10th ECCOMAS Thematic Conference on Smart Structures and Materials, 2023, Page(s) SS14 - Microsensors for aerospace applications
Publisher: ECCOMAS SMART2023
DOI: 10.7712/150123.9925.446129

A Novel Piezoresitive Microphone MEMS Sensor For Aerospace Applications

Author(s): Ha Duong Ngo, Kolja Erbacher, Lixiang Wu, Bei Wang, Zirui Pang, Julien Weiss, Pablo Acedo
Published in: 2022 IEEE International Conference on Electrical, Computer and Energy Technologies (ICECET) Proceedings, 2022, ISBN 978-1-6654-7087-2
Publisher: IEEE
DOI: 10.1109/icecet55527.2022.9872990

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