Large-stroke and high-speed nanoscanning for multi-photon polymerization 3D lithography

Project Information

NanoScan

Grant agreement ID: 101026104

DOI

10.3030/101026104

Project closed

EC signature date 19 March 2021

Start date 1 December 2021

End date 11 July 2025

Funded under

• EXCELLENT SCIENCE - Marie Skłodowska-Curie Actions

Total cost

€ 337 400,64

EU contribution

€ 337 400,64

Coordinated by

UNIVERSITY OF WARWICK
United Kingdom

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Links to deliverables and publications from FP7 projects, as well as links to some specific result types such as dataset and software, are dynamically retrieved from OpenAIRE .

Publications

Peer reviewed articles (10)

A Hybrid Add-on Damping Strategy for Self-Stabilization Nanopositioning System With High-Static-Low-Dynamic Stiffness Property

Author(s): Chengsi Huang, Zhihang Lin, Hui Tang, Shiyu Shu, Qiang Liu
Published in: IEEE Transactions on Industrial Electronics, Issue 72, 2025, Page(s) 5041-5050, ISSN 0278-0046
Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/tie.2024.3463013

A Compliant Self-Stabilization Nanopositioning Device With Modified Active–Passive Hybrid Vibration Isolation Strategy

Author(s): Zhongyuan Zhu, Hui Tang, Yunwei Huang, Zhihang Lin, Yanling Tian, Peng Yu, Chanmin Su
Published in: IEEE/ASME Transactions on Mechatronics, Issue 28, 2024, Page(s) 3305-3316, ISSN 1083-4435
Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/tmech.2023.3265329

A Novel Compliant Connection Mechanism with Thermal Distortion Self-Elimination Function

Author(s): Yunyang Huang, Zhanchen Liao, Zhihang Lin, Fahui Feng, Hui Tang
Published in: Micromachines, Issue 15, 2024, Page(s) 774, ISSN 2072-666X
Publisher: Multidisciplinary Digital Publishing Institute (MDPI)
DOI: 10.3390/mi15060774

Design and Testing of a Compliant ZTTΘ Positional Adjustment System with Hybrid Amplification

Author(s): Zhishen Liao, Zhihang Lin, Hui Tang, Bo Liu, Yingjie Jia
Published in: Micromachines, Issue 15, 2024, Page(s) 608, ISSN 2072-666X
Publisher: Multidisciplinary Digital Publishing Institute (MDPI)
DOI: 10.3390/mi15050608

Design and Test of a Cross-Scale Compliant Rotary Actuator with Minimum Actuation Redundancy and Sub-Microradian Resolution

Author(s): Yingjie Jia, Jinyuan Cao, Zhishen Liao, Wei Wu, Hui Tang , Yanling Tian, Yuzhang Wei
Published in: Actuators, Issue 19, 2025, ISSN 2076-0825
Publisher: MDPI
DOI: 10.3390/act14060284

A Novel Thermal Deformation Self-Stabilization Flexible Connection Mechanism

Author(s): Fahui Feng, Zhihang Lin, Hui Tang
Published in: Actuators, Issue 13, 2024, Page(s) 146, ISSN 2076-0825
Publisher: mdpi
DOI: 10.3390/act13040146

Development and Control of a Flying Ejector-Pin System With Local Gain-Scheduling ILC Scheme

Author(s): Chengsi Huang, Bo Wang, Hui Tang, Zhishen Liao, Zhihang Lin, Ruizhou Wang
Published in: IEEE Transactions on Industrial Informatics, Issue 21, 2025, Page(s) 2383-2392, ISSN 1551-3203
Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/tii.2024.3507179

Design and testing of a hollow single-actuation vertical stage integrated into an XYZ nanopositioner

Author(s): Shengxi Li, Chengsi Huang, Zihao Pan, Huanhao Cai, Yingjie Jia, Zhihang Lin, Hui Tang
Published in: Sensors and Actuators A: Physical, Issue 384, 2025, Page(s) 116267, ISSN 0924-4247
Publisher: Elsevier BV
DOI: 10.1016/j.sna.2025.116267

Nonlinear effect analysis and compensation based on improved friction observer for torque rotating stage

Author(s): Yingjie Jia, Bo Liu, Hui Tang, Yuzhang Wei
Published in: Nanotechnology and Precision Engineering, Issue 8, 2025, Page(s) 033013, ISSN 1672-6030
Publisher: Tianjin Daxue/Tianjin University
DOI: 10.1063/10.0036170

A new inchworm piezoelectric rotary motor with optimized vibration and frictional slipping effects

Author(s): Yingjie Jia, Yuzhang Wei, Hui Tang, Xin Chen, Zhi-xin Yang, Yanling Tian
Published in: Precision Engineering, Issue 17, 2025, Page(s) 17, ISSN 0141-6359
Publisher: Elsevier BV
DOI: 10.1016/j.precisioneng.2025.05.018

Conference proceedings (6)

Visual focusing and levelling towards optical inspection of Mini/MicroLED panels

Author(s): Hui Tang, Yuzhang Wei, Xiaoxian Ou, Yingjie Jia, Yanling Tian
Published in: euspen’s 24th International Conference & Exhibition (euspen), Issue 4, 2024
Publisher: The European Society for Precision Engineering and Nanotechnology

A Robust Iterative Learning Controlling Strategy Dedicate to Mini-LED Mass Transfer

Author(s): Chengsi Huang, Hongcheng Li, Zhishen Liao, Zhihang Lin, Hui Tang, Yanling Tian
Published in: 2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), Issue 6, 2022, Page(s) 190-195
Publisher: IEEE
DOI: 10.1109/3m-nano56083.2022.9941561

Design and Modelling of a Generic Compliant Mechanism with Bi-stability and Static Balancing

Author(s): Jiaxiang Zhu, Guangbo Hao, Hui Tang
Published in: 2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), Issue 7, 2022, Page(s) 172-177, ISBN 978-1-6654-7543-3
Publisher: IEEE
DOI: 10.1109/3m-nano56083.2022.9941512

Design and Assessment of 3-DOF Nano-Gimbal for Spatial Manipulation

Author(s): Chengsi Huang, Huanhao Cai, Shengxi Li, Zihao Pan, Zhihang Lin, Hui Tang
Published in: 2024 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), Issue 6, 2025, Page(s) 173-178
Publisher: IEEE
DOI: 10.1109/3m-nano61605.2024.10769698

Design and Verification of Visual Detection Algorithm for Mini LED Chip and Panel Defects

Author(s): Zhiqiang Dong, Zhenkai Li, Xiaoxian Ou, Wei Chen, Dan Wang, Hui Tang
Published in: Proceedings of the 2024 2nd Asia Symposium on Image and Graphics, Issue 7, 2025, Page(s) 47-53
Publisher: ACM
DOI: 10.1145/3718441.3718448

Design and Analysis of a Novel Continuous Ejector Pin Mechanism for Mini-LED Mass Transfer

Author(s): Zhishen Liao, Hongcheng Li, Chengsi Huang, Zhihang Lin, Hui Tang, Yanling Tian
Published in: 2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), Issue 6, 2022, Page(s) 184-189, ISBN 978-1-6654-7543-3
Publisher: IEEE
DOI: 10.1109/3m-nano56083.2022.9941719