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Large-stroke and high-speed nanoscanning for multi-photon polymerization 3D lithography


Multi-photon polymerization 3D nanolithography (MPP 3D-NL) technology has great advantages in fabricating arbitrary 3D micro/nanostructures of various materials with nanoscale resolution. However, how to simultaneously achieve large-size and high-efficiency fabrication has become a very challenging issue for the MPP 3D-NL fabrication due to the shortcoming of small workspace of the nanoscanning system. At present, the scientific community has to rely on “splicing” to achieve large-size fabrication, which leads to the machining accuracy and efficiency are greatly limited. Recent requirements on additive manufacturing and 3D nano lithography aggravate these challenges. This proposal aims at realizing the large-size 3D micro/nanostructures machining and guaranteeing the high quality MPP 3D-NL fabrication by developing of a set of nanoscanning system with cubic centimeter workspace. By developing of bio-inspired wheel-type nanomotor, WTM-actuated XYZ nanoscanner, laser scanning galvanometer with vibration self-damping property, array surface-forming technics and double closed-loop high-bandwidth control strategy, difficulties in MPP 3D-NL fabrication could be well treated. Taking advantages of the novel, high-quality and multidisciplinary features of this programme, high-impact and fruitful outcomes are expected to be produced with improved performance of MPP 3D-NL fabrication technique in practice. This project brings together an experienced scientist with a unique skill set of flexure-based nanoscanning with an internationally recognized research group with expertises in precision mechanisms and micro/nano manipulations. The developments in the project could accelerate the candidate’s career development as a leading independent scientist and could enhance the reputation of the host institute. It would be also helpful to strengthen the European leadership in the field of advanced micro/nano manufacturing.

Call for proposal

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Funding Scheme

MSCA-IF-EF-CAR - CAR – Career Restart panel


Kirby Corner Road - University House
CV4 8UW Coventry
United Kingdom
Activity type
Higher or Secondary Education Establishments
EU contribution
€ 337 400,64