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MINiaturized Electron Optics for Nano-controlled beams

Periodic Reporting for period 1 - MINEON (MINiaturized Electron Optics for Nano-controlled beams)

Période du rapport: 2021-06-01 au 2022-01-31

Electron microscopy allows scientists to measure and image materials and their properties down to the atomic scale, bringing to fruition Feynman’s vision that an electron microscope should be a key instrument for nanoscience. However, for many years the development of the electron microscope has focused primarily on improvements in spatial and spectroscopic resolution, through the use of bulky magnetic lenses to control the electron beam. Recently, concepts such as “beam shaping” have been transferred from light optics to electron microscopy, allowing for more complicated experiments by endowing the electron beam with a more complex shape than a standard lense can produce.

During the Q-SORT FET project, we introduced an innovative approach for electron beam shaping based on microelectromechanical systems (MEMS) technology, involving the use of miniaturised silicon chips to produce electric fields that change the path of the electron beam.

The objective of the MINEON project was to further validate the design of a specific MEMS device for shaping an electron beam into a vortex. The overall aim was to improve this device and to explore its market exploitation potential in the electron microscopy community through market surveys, cost modelling and dissemination targeted, with the aim of attracting and assessing the interest of prospective users and investors.

When compared with standard electron optics, our MEMS approach is revolutionary because the setup is significantly simpler, more compact and more flexible, while enabling unconventional phase shaping of electron beams. The required MEMS technology is of further commercial interest because it enables other beam shaping devices, which could address the correction of lens imperfections and enhance image contrast.

The importance of the project for society results from technical advancements in electron microscopy, for example for improving the imaging of proteins for research into human health and the diagnosis of diseases. It is also expected to create job opportunities through the creation of a spin-off company.
During the MINEON project, three activities were carried out: improving the TRL of the MEMS device for electron beam shaping, spreading awareness and interest about the device in the electron microscopy community and the evaluation of a business case.

In order to increase the TRL of the device, we solved a number of technical problems (electrical boundary conditions, electrical biasing, control software) that had limited its use and produced a series of working prototypes. The solutions that we developed are of general interest for MEMS deployment.

We then created a pilot application for the device by using it to create electron vortex beams with very large angular momentum. This work has been published on arXIv. We achieved one of the largest electron vortex beams that has been recorded to date.

We used the Logo and web page of the project as an initial instrument for dissemination. We made use of social media by creating appealing content that included CGI graphics, experimental images and simulations. We also had two videos of testimonials (Prof. McMorran from the University of Oregon and Prof. Axel Lubk from IFW Dresden), who supported the MINEON project.

The viability of commercial activity was assessed by conducting polls at the beginning and end of the project. We also estimated the production and installation costs and how they scale with volume of production.

By comparing the costs with the demand curve (determined from the polls), we were able to estimate the viability of a spin-off company based on exploitation in collaboration with ThermoFisher Scientific. Estimations of revenues were performed for several different scenarios.
The MINEON project has provided scientific results beyond the state of the art in electron vortex beam creation and applications, based on the refinement of a MEMS device and its use to provide precise electron beam control, including the creating of electron vortex beams with very large angular momentum.

Such quantum states of electrons are interesting from a fundamental perspective, for example to study the limits of the quantum and classical world. They also open the door to applications such as more precise magnetic measurements. From a practical perspective, the electronics and software that are used to control the device have been demonstrated to operate reliably and to be user-friendly.

The TRL of the device has been increased to 7-8, taking care of all aspects of user demand. The device is ready to be used for applications such as the improved imaging of proteins and delicate samples. The long-term societal impact of the project is therefore clear.

The economic impact results from possibilities to open a new production line that is intended to support the creation of a spin-off company. Such a company is expected to open the way to MEMS-based electronics for a broader range of applications.

We have studied the possible exploitation of the device, starting from a market segmentation based on different academic and industrial microscopy users. We singled out “early adopters” in academic environments as a reference market. We also engaged in a more extended dissemination campaign that involved a web page, a logo, a social media presence, the realisation of accurate computer graphics and assistance from important scientists to provide testimonials.

In parallel to the market analysis, an accurate cost analysis has led to the creation of a business case with a plan of costs, revenues and potential numbers for growth.

In the long term, we have also planned how to make the business sustainable through synergies with other MEMS activities and with the commercial and technical structure of ThermoFisher Scientific.
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