Electron microscopy allows scientists to measure and image materials and their properties down to the atomic scale, bringing to fruition Feynman’s vision that an electron microscope should be a key instrument for nanoscience. However, for many years the development of the electron microscope has focused primarily on improvements in spatial and spectroscopic resolution, through the use of bulky magnetic lenses to control the electron beam. Recently, concepts such as “beam shaping” have been transferred from light optics to electron microscopy, allowing for more complicated experiments by endowing the electron beam with a more complex shape than a standard lense can produce.
During the Q-SORT FET project, we introduced an innovative approach for electron beam shaping based on microelectromechanical systems (MEMS) technology, involving the use of miniaturised silicon chips to produce electric fields that change the path of the electron beam.
The objective of the MINEON project was to further validate the design of a specific MEMS device for shaping an electron beam into a vortex. The overall aim was to improve this device and to explore its market exploitation potential in the electron microscopy community through market surveys, cost modelling and dissemination targeted, with the aim of attracting and assessing the interest of prospective users and investors.
When compared with standard electron optics, our MEMS approach is revolutionary because the setup is significantly simpler, more compact and more flexible, while enabling unconventional phase shaping of electron beams. The required MEMS technology is of further commercial interest because it enables other beam shaping devices, which could address the correction of lens imperfections and enhance image contrast.
The importance of the project for society results from technical advancements in electron microscopy, for example for improving the imaging of proteins for research into human health and the diagnosis of diseases. It is also expected to create job opportunities through the creation of a spin-off company.
