Made-to-measure micromachining with laser beams tailored in amplitude and phase

Project Information

METAMORPHA

Grant agreement ID: 101057457

DOI

10.3030/101057457

EC signature date 24 May 2022

Start date 1 September 2022

End date 28 February 2027

Funded under

• Digital, Industry and Space

Total cost

€ 6 994 296,75

EU contribution

€ 6 994 296,00

Coordinated by

FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV
Germany

CORDIS provides links to public deliverables and publications of HORIZON projects.

Links to deliverables and publications from FP7 projects, as well as links to some specific result types such as dataset and software, are dynamically retrieved from OpenAIRE .

Deliverables

Documents, reports (1)

Technoeconomic Assessment of laser & machining systems

Publications

Peer reviewed articles (10)

Real-time analysis of inline sensor data during USP-laser machining

Author(s): Milena Žurić, Goomaral Sukhbold
Published in: Journal of Laser Applications, Issue 36, 2025, ISSN 1042-346X
Publisher: Laser Institute of America
DOI: 10.2351/7.0001544/20145314/042004_1_7.0001544.PDF

Toward Taper-Free Structures in Ultrashort Pulse Laser Ablation Using Liquid Crystal Spatial Light Modulators

Published in: Journal of Laser Micro/Nanoengineering, 2025, ISSN 1880-0688
Publisher: Japan Laser Processing Society
DOI: 10.2961/JLMN.2025.01.2003

Double-Pulse Femtosecond Laser Fabrication of Highly Ordered Periodic Structures on Au Thin Films Enabling Low-Cost Plasmonic Applications

Author(s): Fotis Fraggelakis, Panagiotis Lingos, George D. Tsibidis, Emma Cusworth, Nicholas Kay, Laura Fumagalli, Vasyl G. Kravets, Alexander N. Grigorenko, Andrei V. Kabashin, Emmanuel Stratakis
Published in: ACS Nano, Issue 19, 2025, ISSN 1936-0851
Publisher: American Chemical Society (ACS)
DOI: 10.1021/ACSNANO.5C06177

Beyond the IFTA – Phase mask generation for 3D laser beam shaping, tailored temperature distributions and optical amplifiers

Author(s): Oskar Hofmann, Paul Buske, Robin Kurth, Annika Bonhoff, Carlo Holly
Published in: Journal of the European Optical Society-Rapid Publications, Issue 21, 2025, ISSN 1990-2573
Publisher: EDP Sciences
DOI: 10.1051/JEOS/2025013

Efficient Surface Roughness Prediction in Laser Micromachining via Explainability‐Driven Feature Reduction

Author(s): Miguel Camacho‐Sánchez, Fran Pastor‐Naranjo, Luis Correas‐Naranjo, Nélida Mirabet‐Herranz, Laëtitia Launet, Milena Zuric, Valery Naranjo
Published in: Expert Systems, Issue 43, 2026, ISSN 0266-4720
Publisher: Wiley
DOI: 10.1111/EXSY.70257

Fabrication of laser-induced periodic surface structures on bulk polycarbonate using ultrafast laser processing in the infrared regime

Author(s): Matina Vlahou, George D. Tsibidis, Emmanuel Stratakis
Published in: Optics & Laser Technology, Issue 204, 2026, ISSN 0030-3992
Publisher: Elsevier BV
DOI: 10.1016/J.OPTLASTEC.2026.116124

Deciphering carrier dynamics in polycarbonate following excitation with ultrashort laser pulses

Author(s): George D. Tsibidis, Matina Vlahou, Stella Maragkaki, Ioannis Konidakis, Emmanuel Stratakis
Published in: Journal of Applied Physics, Issue 138, 2025, ISSN 0021-8979
Publisher: AIP Publishing
DOI: 10.1063/5.0281094/20623789/053103_1_5.0281094.PDF

Influence of inter-pulse delay and geometric constraints on damage and optical characteristics in thin metal targets irradiated by double ultrashort laser pulses

Author(s): George D. Tsibidis
Published in: Applied Surface Science, Issue 732, 2026, ISSN 0169-4332
Publisher: Elsevier BV
DOI: 10.1016/J.APSUSC.2026.166516

A study of the formation mechanisms of periodic surface structures on rutile TiO₂ single crystal induced by delayed, cross-polarized femtosecond ultraviolet laser pulses

Author(s): A. Kanaev, G.D. Tsibidis, E. Stratakis, L. Museur
Published in: Surfaces and Interfaces, Issue 95, 2026, ISSN 2468-0230
Publisher: Elsevier BV
DOI: 10.1016/J.SURFIN.2026.109813

Real-time analysis of inline sensor data during USP-laser machining

Author(s): Milena Žurić and Goomaral Sukhbold
Published in: Journal of Laser Applications, Issue Vol. 36, 2024, ISSN 1938-1387
Publisher: LIA
DOI: 10.2351/7.0001544

Conference proceedings (11)

Training techniques for robust laser beam shaping with diffractive neural networks

Author(s): Paul Buske, Louis Michels, Oskar Hofmann, Annika Bonhoff, Carlo Holly
Published in: Practical Holography XXXIX: Displays, Materials, and Applications, 2025, ISSN 0277-786X
Publisher: SPIE
DOI: 10.1117/12.3041210

Tailoring the Properties of the Electromagnetic Modes Excited by Mid-IR fs Pulses at the Interface Between Si and SiO₂ Coatings by Adjusting the Thickness of the Dielectric Material

Author(s): G. D. Tsibidis, E. Stratakis
Published in: 2025 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC), 2025, ISSN 2833-1052
Publisher: IEEE
DOI: 10.1109/CLEO/EUROPE-EQEC65582.2025.11110282

Localization of a workpiece position and orientation by means of off axis photodiodes

Author(s): Milena Zuric
Published in: High-Power Laser Materials Processing: Applications, Diagnostics, and Systems XIV, 2025, ISSN 0277-786X
Publisher: SPIE
DOI: 10.1117/12.3038897

Enhancing three-dimensional beam shaping accuracy through cascaded spatial light modulators using diffractive neural networks

Author(s): Paul Buske, Fynn Janssen, Oskar Hofmann, Jochen Stollenwerk, Carlo Holly
Published in: SPIE Optical Systems Design 2024, 2024, ISSN 0277-786X
Publisher: SPIE
DOI: 10.1117/12.3023102

Micromachining upscaling from W to kW: the evolution of femtosecond laser applications

Author(s): Anne Henrottin, Jérôme Patars, Antoine Defroidmont, Marc Décultot, Audrey Champion, Céline Petit, David Bruneel
Published in: Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXXI, 2026, ISSN 0277-786X
Publisher: SPIE
DOI: 10.1117/12.3077171

Impact of plasmonic modes and thermophysical properties on the double-pulse structuring of highly ordered LIPSS for biosensing applications

Author(s): G. D. Tsibidis, F. Fraggelakis, P. Lingos, E. Cusworth, V. G. Kravets, A. N. Grigorenko, A. V. Kabashin, E. Stratakis
Published in: Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2026, 2026, ISSN 0277-786X
Publisher: SPIE
DOI: 10.1117/12.3091292

Diffractive neural networks for robust laser beam shaping with B-spline-parameterized phase masks

Author(s): Dominik Onyszkiewicz, Kira Laumann, Paul Buske, Annika Bonhoff, Carlo Holly
Published in: Computational Optics 2026, 2026, ISSN 0277-786X
Publisher: SPIE
DOI: 10.1117/12.3099112

Diffractive Neural Networks Built from Spatial Light Modulators for Laser Beam Shaping in the NIR and VIS

Author(s): Paul Buske, Jochen Stollenwerk and Carlo Holly
Published in: IODC 2023, 2023, ISSN 0277-786X
Publisher: SPIE
DOI: 10.1117/12.2692407

Towards Sustainable Precision: Machine Learning for Laser Micromachining Optimization

Author(s): Luis Correas-Naranjo, Miguel Camacho-Sánchez, Laëtitia Launet, Milena Zuric, Valery Naranjo
Published in: Lecture Notes in Computer Science, Intelligent Data Engineering and Automated Learning – IDEAL 2024, 2024
Publisher: Springer Nature Switzerland
DOI: 10.1007/978-3-031-77731-8_4

"""Auf zwei kaskadierten Phasenmodulatoren basierendes optisches Modul für die flexible Lasermaterialbearbeitung"""

Author(s): Mario Hesker, Paul Buske, Annika Bonhoff, Carlo Holly
Published in: 2024
Publisher: DGAO

Pushing scan speed limits in ultrashort pulse laser polishing of steel

Author(s): Marcel Kniffler, Astrid Sassmannshausen
Published in: Laser-based Micro- and Nanoprocessing XX, 2026, ISSN 0277-786X
Publisher: SPIE
DOI: 10.1117/12.3078567