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Non-Destructive Fully Automated Subsurface Metrology and Inspection for the Semiconductor Industry

Objective

Nearfield Instruments (NFI) is the only European organization offering advanced metrology and inspection (M&I) solutions for the semiconductor industry. In a nutshell, NFI develops machines used by chip manufacturers to check the quality of their products. Without M&I machines, the whole microelectronics industry would not exist, and society would be very different from as we know it today.

During the EIC project, we will mature the most advanced M&I machine worldwide, called AUDIRA. AUDIRA will be the first and only technology that can perform non-destructive subsurface metrology and inspection, which means that is able to measure through and below multiple layers of the wafer without damaging it. The need for revolutionary M&I systems, like AUDIRA, is a direct consequence of the evolution of semiconductor devices to smaller geometries and more complex multi-level circuitry. The construction of an advanced wafer fabrication facility to manufacture these devices can cost over €5 billion, which is substantially more than previous- generation facilities. Therefore, chipmakers need to increase the yield to maximize the returns from their manufacturing equipment.

Hence, the need for advanced M&I machines, like AUDIRA. AUDIRA is at TRL 5 and will be taken to TRL 8 during the EIC project. NFI is a reputed organization in this industry, with over 160+ FTEs and an experienced management board. The Chairman of the NFI Supervisory Board is Eric Meurice, former CEO of ASML. NFI has a large IP portfolio (71 patents, 29 owned and 42 licensed by TNO, the research institute from which NFI spun off), three locations worldwide, and existing commercial relationships with the most prestigious semiconductor companies, including Samsung, Intel, and TSMC. Our company will break even in 2026, and thanks to our high margins, we will cumulate over 1 Bn€ in net income in just three years (2026-28) also thanks to the commercialization of a different, yet related, M&I system called QUADRA.

Fields of science (EuroSciVoc)

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Keywords

Project’s keywords as indicated by the project coordinator. Not to be confused with the EuroSciVoc taxonomy (Fields of science)

Programme(s)

Multi-annual funding programmes that define the EU’s priorities for research and innovation.

Topic(s)

Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.

Funding Scheme

Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.

HORIZON-EIC-ACC - HORIZON EIC Accelerator

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Call for proposal

Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.

(opens in new window) HORIZON-EIC-2024-ACCELERATOR-02

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Coordinator

NEARFIELD INSTRUMENTS B.V.
Net EU contribution

Net EU financial contribution. The sum of money that the participant receives, deducted by the EU contribution to its linked third party. It considers the distribution of the EU financial contribution between direct beneficiaries of the project and other types of participants, like third-party participants.

€ 2 496 499,00
Address
VARESEWEG 5
3047 AT Rotterdam
Netherlands

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
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Total cost

The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.

No data
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