Investigation of Si wafer damage in manufacturing processes

Project Information

SIDAM

Grant agreement ID: 216382

Closed project

Start date 1 January 2008

End date 30 June 2011

Funded under

• Specific Programme "Cooperation": Information and communication technologies

Total cost € 2 647 698,00

EU contribution € 2 049 997,00

Coordinated by

UNIVERSITY OF DURHAM
United Kingdom