Investigation of Si wafer damage in manufacturing processes

Project description

Next-Generation Nanoelectronics Components and Electronics Integration
The main SIDAM objective is to develop a cost-effective metrology tool that would detect substrate damage and predict yield loss.

Field of science

• /natural sciences/physical sciences/electromagnetism and electronics/electrical conductivity/semiconductor
• /natural sciences/physical sciences/electromagnetism and electronics/semiconductor device

Programme(s)

• FP7-ICT - Specific Programme "Cooperation": Information and communication technologies

Topic(s)

• ICT-2007.3.1 - Next-generation nanoelectronic components and electronics integration

Call for proposal

FP7-ICT-2007-1
See other projects for this call

Funding Scheme

CP - Collaborative project (generic)

Coordinator

UNIVERSITY OF DURHAM

Address

Stockton Road The Palatine Centre
DH1 3LE Durham
United Kingdom

Activity type

Higher or Secondary Education Establishments

EU contribution

€ 441 576

Administrative Contact

Wendy Harle (Ms.)

Participants (7)

KARLSRUHER INSTITUT FUER TECHNOLOGIE

Germany

EU contribution

€ 181 475

Address

Kaiserstrasse 12
76131 Karlsruhe

Activity type

Higher or Secondary Education Establishments

Administrative Contact

Natascha Wallburg (Ms.)

ALBERT-LUDWIGS-UNIVERSITAET FREIBURG

Germany

EU contribution

€ 164 100

Address

Fahnenbergplatz
79098 Freiburg

Activity type

Higher or Secondary Education Establishments

Administrative Contact

Klaus Dueformantel (Herr)

FORSCHUNGSZENTRUM KARLSRUHE GMBH

Participation ended

Germany

EU contribution

€ 168 786

Address

Weberstrasse 5
76133 Karlsruhe

Activity type

Higher or Secondary Education Establishments

Administrative Contact

Rolf Brannath (Mr.)

ASOCIACION CENTRO TECNOLOGICO CEIT

Spain

EU contribution

€ 540 120

Address

Paseo Manuel De Lardizabal 15
20018 San Sebastian

Activity type

Research Organisations

Administrative Contact

José Ignacio de Carlos (Mr)

DUBLIN CITY UNIVERSITY

Ireland

EU contribution

€ 225 509

Address

Glasnevin
9 Dublin

Activity type

Higher or Secondary Education Establishments

Administrative Contact

EUGENE KENNEDY (PROF.)

Jordan Valley Semiconductors UK Ltd

United Kingdom

EU contribution

€ 328 431

Address

Belmont Business Park Belmont
DH1 1TW Durham

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

Administrative Contact

Paul Ryan (Dr.)

BEDE SCIENTIFIC INSTRUMENTS LIMITED

Participation ended

United Kingdom

EU contribution

€ 0

Address

Belmont Business Park
DH1 1TW Durham

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

Administrative Contact

David Hall (Mr)