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Investigation of Si wafer damage in manufacturing processes

Project description


Next-Generation Nanoelectronics Components and Electronics Integration
The main SIDAM objective is to develop a cost-effective metrology tool that would detect substrate damage and predict yield loss.

Call for proposal

FP7-ICT-2007-1
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Coordinator

UNIVERSITY OF DURHAM
Address
Stockton Road The Palatine Centre
DH1 3LE Durham
United Kingdom

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Activity type
Higher or Secondary Education Establishments
Administrative Contact
Wendy Harle (Ms.)
EU contribution
€ 441 576

Participants (7)

KARLSRUHER INSTITUT FUER TECHNOLOGIE
Germany
EU contribution
€ 181 475
Address
Kaiserstrasse 12
76131 Karlsruhe

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Activity type
Higher or Secondary Education Establishments
Administrative Contact
Natascha Wallburg (Ms.)
ALBERT-LUDWIGS-UNIVERSITAET FREIBURG
Germany
EU contribution
€ 164 100
Address
Fahnenbergplatz
79098 Freiburg

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Activity type
Higher or Secondary Education Establishments
Administrative Contact
Klaus Dueformantel (Herr)
FORSCHUNGSZENTRUM KARLSRUHE GMBH

Participation ended

Germany
EU contribution
€ 168 786
Address
Weberstrasse 5
76133 Karlsruhe

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Activity type
Higher or Secondary Education Establishments
Administrative Contact
Rolf Brannath (Mr.)
ASOCIACION CENTRO TECNOLOGICO CEIT
Spain
EU contribution
€ 540 120
Address
Paseo Manuel De Lardizabal 15
20018 San Sebastian

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Activity type
Research Organisations
Administrative Contact
José Ignacio de Carlos (Mr)
DUBLIN CITY UNIVERSITY
Ireland
EU contribution
€ 225 509
Address
Glasnevin
9 Dublin

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Activity type
Higher or Secondary Education Establishments
Administrative Contact
EUGENE KENNEDY (PROF.)
Jordan Valley Semiconductors UK Ltd
United Kingdom
EU contribution
€ 328 431
Address
Belmont Business Park Belmont
DH1 1TW Durham

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Paul Ryan (Dr.)
BEDE SCIENTIFIC INSTRUMENTS LIMITED

Participation ended

United Kingdom
EU contribution
€ 0
Address
Belmont Business Park
DH1 1TW Durham

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
David Hall (Mr)