ACAPOLY is a partnership between micro resist technology GmbH and EPFL-LMIS1 whose main objective is the development of a new set of polymer materials for MEMS/NEMS technologies with an associated process library. The materials that the partnership has planned to develop are Ormocer and SU-8. The objective is to modify both materials in a way that they can be processed using Electron Beam Lithography, Direct Laser Writing, UV-Nano Imprint Lithography and Ink-Jet printing. The developed materials and process libraries will be used to fabricate UV-NIL stamps, large arrays of LEDs for automobiles and large arrays of optical waveguides.
Fields of science
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