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Academia and Company collaboration and technology transfer in Advanced POLYmers

Objective

ACAPOLY is a partnership between micro resist technology GmbH and EPFL-LMIS1 whose main objective is the development of a new set of polymer materials for MEMS/NEMS technologies with an associated process library. The materials that the partnership has planned to develop are Ormocer and SU-8. The objective is to modify both materials in a way that they can be processed using Electron Beam Lithography, Direct Laser Writing, UV-Nano Imprint Lithography and Ink-Jet printing. The developed materials and process libraries will be used to fabricate UV-NIL stamps, large arrays of LEDs for automobiles and large arrays of optical waveguides.

Call for proposal

FP7-PEOPLE-2007-3-1-IAPP
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Coordinator

ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE
Address
Batiment Ce 3316 Station 1
1015 Lausanne
Switzerland

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Activity type
Higher or Secondary Education Establishments
Administrative Contact
Juergen Brugger (Prof.)
EU contribution
€ 373 274

Participants (1)

MICRO RESIST TECHNOLOGY GESELLSCHAFT FUER CHEMISCHE MATERIALIEN SPEZIELLER PHOTORESISTSYSTEME MBH
Germany
EU contribution
€ 148 433
Address
Koepenicker Strasse 325
12555 Berlin

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Sylvia Herrndorf (Dr.)