Final Report Summary - MICROPADS (New micro-robotic systems featuring piezoelectric adaptive microstructures for sensing and actuating, with associated embedded control)
The main objective of the project MICROPADS is to develop innovative centi / millimetre active structures integrating on the same piezoelectric material both the actuating and the sensing functions, with control laws enabling the achievement of micro / nanometric resolution and high bandwidth(some hundreds of Hz). To achieve these objectives, the project were split into several multidisciplinary tasks:
- Research of newer materials and different microfabrication technologies to treat them, for high performances actuators and sensors dedicated to the micro and nano-scale. We derived that PMN-PTPiezoelectric materials combined with silicon would be very promising to develop high performances and embarkable microsystems. These PMN-PT / silicon microsystems, called piezoMEMS, can be easily fabricated using existing micro technologies (laser, reactive ionic etching, saw dicing...) allowing therefore the batch fabrication.
- Design of cantilevered microactuators and microgrippers for micromanipulation and microassemblyof micrometric size objects mainly based on a mix of thermal and piezoelectric principles (called hybrid thermopiezoelectric actuator). These innovative microactuators allow a large amplification of the range (up to 5 times more than of classic piezoatcuators) by maintaining the high resolution of positioning. Result: one patent is pending.
- The development of embedded measurement systems for piezoelectric microactuators by employing the self-sensing technique. The developed technique, based on a convenient electronic scheme and an observer technique, allows the use of a piezoelectric microsystems as an actuator and sensor at the same time. Results: major improvement of signals, reduction of system costs, possible applications for AFMs microscopy. The self-sensing technique allows a considerable reduction of space of the measurement and control of the Microsystems since the datagate and the sources are both embedded in one electronic board.
- Development of microrobotics. We designed and successful tested a mobile microrobot actuated based on the combination of magnetic and piezoelectric effects. Result: we participated to the annual competition of micro / nanorobotics held at IEEE ICRA Conference May 2010 in Alaska. Place: 1st place and world record award for the 2 mm dashed challenge.
Contact: MICROPADS project coordinator: Micky Rakotondrabe
Automatic and MicroMechatronics Systems (AS2M)
FEMTO-ST Institute
24, rue Alain Savary
25000 Besançon France
Website: http://www.femto-st.fr/micropads/
- Research of newer materials and different microfabrication technologies to treat them, for high performances actuators and sensors dedicated to the micro and nano-scale. We derived that PMN-PTPiezoelectric materials combined with silicon would be very promising to develop high performances and embarkable microsystems. These PMN-PT / silicon microsystems, called piezoMEMS, can be easily fabricated using existing micro technologies (laser, reactive ionic etching, saw dicing...) allowing therefore the batch fabrication.
- Design of cantilevered microactuators and microgrippers for micromanipulation and microassemblyof micrometric size objects mainly based on a mix of thermal and piezoelectric principles (called hybrid thermopiezoelectric actuator). These innovative microactuators allow a large amplification of the range (up to 5 times more than of classic piezoatcuators) by maintaining the high resolution of positioning. Result: one patent is pending.
- The development of embedded measurement systems for piezoelectric microactuators by employing the self-sensing technique. The developed technique, based on a convenient electronic scheme and an observer technique, allows the use of a piezoelectric microsystems as an actuator and sensor at the same time. Results: major improvement of signals, reduction of system costs, possible applications for AFMs microscopy. The self-sensing technique allows a considerable reduction of space of the measurement and control of the Microsystems since the datagate and the sources are both embedded in one electronic board.
- Development of microrobotics. We designed and successful tested a mobile microrobot actuated based on the combination of magnetic and piezoelectric effects. Result: we participated to the annual competition of micro / nanorobotics held at IEEE ICRA Conference May 2010 in Alaska. Place: 1st place and world record award for the 2 mm dashed challenge.
Contact: MICROPADS project coordinator: Micky Rakotondrabe
Automatic and MicroMechatronics Systems (AS2M)
FEMTO-ST Institute
24, rue Alain Savary
25000 Besançon France
Website: http://www.femto-st.fr/micropads/