Objective - To improve throughput restrictions of CMP planarisation by clustering 2 to 3 polishing heads with a single double sided cleaning unit for 150 and 200 mm wafer processing.- Better performance, lower cost of operation and flexibility for different CMP applications are targeted.- Incorporate robotic handling, SMIF I/O, barcode reader, SECs/ GEM interface and endpoint detection.- Later use of the tool for CMP planarisation of metal or high performance bulk silicon wafer polishing.The performance of a Chemical Mechanical Polishing (CMP) cluster with the potential for 300 mm wafer processing, delivered by P. Wolters, is to be assessed and improved under IC manufacturing conditions at TEMIC in Heilbronn, Germany. A complex technological assessment programme is foreseen as well as intensive work on reliability and uptime improvement and reduction of chemicals consumption to achieve competitive cost of ownership figures. Fields of science natural scienceschemical sciencesinorganic chemistrymetalloids Programme(s) FP4-ESPRIT 4 - Specific research and technological development programme in the field of information technologies, 1994-1998 Topic(s) 2.9 - Building blocks, methods & tools for semiconductor app&techs Call for proposal Data not available Funding Scheme ACM - Preparatory, accompanying and support measures Coordinator Temic Telefunken Microelectronic Gmbh EU contribution No data Address Theresienstrasse 2 74072 Heilbronn Germany See on map Total cost No data
