Objective
- To improve throughput restrictions of CMP planarisation by clustering 2 to 3 polishing heads with a single double sided cleaning unit for 150 and 200 mm wafer processing.
- Better performance, lower cost of operation and flexibility for different CMP applications are targeted.
- Incorporate robotic handling, SMIF I/O, barcode reader, SECs/ GEM interface and endpoint detection.
- Later use of the tool for CMP planarisation of metal or high performance bulk silicon wafer polishing.
The performance of a Chemical Mechanical Polishing (CMP) cluster with the potential for 300 mm wafer processing, delivered by P. Wolters, is to be assessed and improved under IC manufacturing conditions at TEMIC in Heilbronn, Germany. A complex technological assessment programme is foreseen as well as intensive work on reliability and uptime improvement and reduction of chemicals consumption to achieve competitive cost of ownership figures.
Fields of science (EuroSciVoc)
Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
74072 Heilbronn
Germany
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.