Objective
The objectives of the TRIO-VAMP SEA are to evaluate the TRIO at a semiconductor manufacturing facility, together with an equipment manufacturer, in order to obtain:
qualification for a new generation of dry vacuum pump, including treatment of waste gases, for critical manufacturing processes, e.g. metal etching, with leading U.S. fabrication equipment
cost-of-ownership figures in running production for reference and competitive sales
assessment of functionality in crucial running regimes for further improvements
established references from semiconductor manufacturing end-users and guarantee of compatibility from major equipment manufacturers for optional purchase by future customers
The proposed evaluation will give Leybold the unique opportunity to have its equipment evaluated by an industrial user as well as a wafer fabrication equipment maker. A broad base of fab managers, facilities managers, and processes are included in the evaluation.
In order to meet the customer needs for more efficient, cost-effective vacuum/ abatement/monitoring methods, Leybold Vakuum GmbH developed a new component system in a joint venture with DAS GmbH, a leading European waste gas abatement specialists. This system, TRIO, comprises a dry vacuum pump, hazardous waste gas abatement, and monitoring of status, including control. This new concept was introduced to the market at Semicon-Europa (April 1996), where the prototype attracted a lot of attention. Leybold assumes product responsibility and asks a major IC fab and the worldwide leading equipment manufacturer to support TRIO by participating in an SEA project.
Expected results include reduction of CoO for vacuum/abatement/monitoring through high mean-time-between-failure, low mean-time-to-repair, and high abatement efficiency.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- engineering and technology mechanical engineering manufacturing engineering
- natural sciences physical sciences electromagnetism and electronics semiconductivity
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
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Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
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Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
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Coordinator
85356 FREISING
Germany
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.