CORDIS fournit des liens vers les livrables publics et les publications des projets HORIZON.
Les liens vers les livrables et les publications des projets du 7e PC, ainsi que les liens vers certains types de résultats spécifiques tels que les jeux de données et les logiciels, sont récupérés dynamiquement sur OpenAIRE .
Résultats exploitables
The CFC tool uses centrifugal force drying combined with infra-red light heaters, allowing a very high real throughput. This competitive advantage allows fab managers to use a small and flexible team that can also concentrate on other activities than container washing.
The two main technological achievements of the CFC tool are (1) it eliminates exterior air heaters, thanks to the construction of high-rev parts rotation, (2) it allows direct heating of the material to drythrough radiation.
These results have a strong impact on future washing processor tests. Wafer washing associated with VDP sampling technology and AAS (Atomic Absorption Spectrometry) and ICPMS (Inductive Coupled Plasma Mass Spectrometer) measurement tools gives good results as well as TXRF (Total X-Ray Fluorescence) on those wafers for metallic elements. The quick reconfiguration of the tool for 200 and 300 mm needs, or any other type of container which would fit into the process chamber, is also of very high interest.
Recherche de données OpenAIRE...
Une erreur s’est produite lors de la recherche de données OpenAIRE
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