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Risultati sfruttabili
The CFC tool uses centrifugal force drying combined with infra-red light heaters, allowing a very high real throughput. This competitive advantage allows fab managers to use a small and flexible team that can also concentrate on other activities than container washing.
The two main technological achievements of the CFC tool are (1) it eliminates exterior air heaters, thanks to the construction of high-rev parts rotation, (2) it allows direct heating of the material to drythrough radiation.
These results have a strong impact on future washing processor tests. Wafer washing associated with VDP sampling technology and AAS (Atomic Absorption Spectrometry) and ICPMS (Inductive Coupled Plasma Mass Spectrometer) measurement tools gives good results as well as TXRF (Total X-Ray Fluorescence) on those wafers for metallic elements. The quick reconfiguration of the tool for 200 and 300 mm needs, or any other type of container which would fit into the process chamber, is also of very high interest.
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