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Extreme UV concept lithographic development system

Funding Scheme

CSC - Cost-sharing contracts

Coordinator

ASM Lithography B.V.
Address
De Run 1110
5503 LA Veldhoven
Netherlands

Participants (2)

CARL ZEISS
Germany
Address
Carl-zeiss-str. 4-54
73447 Oberkochen
Oxford Instruments Plc
United Kingdom
Address
Old Station Road, Eynsham
OX8 1TL Witney