Extreme UV concept lithographic development system

Project Information

EUCLIDES

Grant agreement ID: 28160

Project closed

Start date 1 August 1998

End date 31 January 2000

Funded under

• Specific research and technological development programme in the field of information technologies, 1994-1998

Total cost € 10 000 000,00

EU contribution € 5 000 000,00

Coordinated by

ASM Lithography B.V.
Netherlands

Programme(s)

• FP4-ESPRIT 4 - Specific research and technological development programme in the field of information technologies, 1994-1998

Topic(s)

• 2.8 - Semiconductors - Building blocks, methods & tools

Call for proposal

Data not available

Funding Scheme

CSC - Cost-sharing contracts

Coordinator

ASM Lithography B.V.

• EU contribution: No data
• Address: De Run 1110 ; 5503 LA Veldhoven ; Netherlands
• Total cost: No data

Participants (2)

CARL ZEISS

Germany

• EU contribution: No data
• Address: Carl-Zeiss-Str. 4-54 ; 73447 OBERKOCHEN
• Total cost: No data

Oxford Instruments Plc

United Kingdom

• EU contribution: No data
• Address: Old Station Road, Eynsham ; OX8 1TL Witney
• Total cost: No data