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Semiconductor Industry Leading towards Viable Energy Recovery

Objective

There is no doubt that ICT, supported by semiconductor technology, can play in using more efficiently energy resources and in allowing the adoption of renewable energy production, care must be taken that the complete life cycle of the envisaged technologies is considered, and that also the energy costs for the production of the critical semiconductor components are minimized. This concept applies also to all industrial sectors, like photovoltaics and solid-state lighting, that are largely based on the same technologies as semiconductor manufacturing. The envisaged “green society” can only be such if based on “green fabs” for the manufacturing of the critical components.
The SILVER project targets at the design, development and assessment of innovative and comprehensive approaches to reduce the environmental impact of existing semiconductor manufacturing. The project will focus on the development of innovative solutions for the reduction of water and energy consumption, which will result also in the mitigation of greenhouse effect.
The project aims to achieve the result through a sequence of coordinated R&D actions involving facility and equipment development.
The path to solution will be:
a) Reduction of direct energy consumption through:
• control of the idle mode of equipment
• equipment and process modelling
• optimization of process recipes on plasma equipment
b) Reduction of D.I. water consumption through:
• Introduction of new cleaning procedures;
• Optimization of water consumption in critical process steps;
• Water recycling and re-use.

The final objective is to demonstrate new technologies that will enable the participating companies to achieve reduction in water and energy consumption in line with the targets that international organizations are defining for the next period.

Field of science

  • /natural sciences/physical sciences/electromagnetism and electronics/electrical conductivity/semiconductor
  • /engineering and technology/environmental engineering/energy and fuels/renewable energy
  • /engineering and technology/environmental engineering/waste management/energy recovery
  • /engineering and technology/environmental engineering/waste management/energy efficiency

Call for proposal

ENIAC-2011-1
See other projects for this call

Funding Scheme

JTI-CP-ENIAC - Joint Technology Initiatives - Collaborative Project (ENIAC)

Coordinator

Numonyx Italy Srl
Address
Via Camillo Olivetti 2
20864 Agrate Brianza
Italy
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EU contribution
€ 194 639
Administrative Contact

Participants (13)

Air Liquide electronics Systems
France
EU contribution
€ 206 694
Address
Rue Cognacq Jay 6
75007 Paris
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
LABORATORIOS ALPHA SAN IGNACIO PHARMA S.L. - ALPHASIP
Spain
EU contribution
€ 86 418
Address
Calle Cervantes 40 - 3P - Pc
50006 Zaragoza
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
ASM EUROPE BV
Netherlands
EU contribution
€ 164 602
Address
Versterkerstraat 8
1322 AP Almere
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
AGENCIA ESTATAL CONSEJO SUPERIOR DEINVESTIGACIONES CIENTIFICAS
Spain
EU contribution
€ 60 621
Address
Calle Serrano 117
28006 Madrid
Activity type
Research Organisations
Administrative Contact
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium
EU contribution
€ 33 788
Address
Kapeldreef 75
3001 Leuven
Activity type
Research Organisations
Administrative Contact
LFOUNDRY SRL
Italy
EU contribution
€ 120 240
Address
Via A Pacinotti 7
67051 Avezzano Aq
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
ON SEMICONDUCTOR BELGIUM BVBA
Belgium
EU contribution
€ 180 360
Address
Westerring 15
9700 Oudenaarde
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Netherlands
EU contribution
€ 197 265
Address
Anna Van Buerenplein 1
2595 DA Den Haag
Activity type
Research Organisations
Administrative Contact
VDL ENABLING TECHNOLOGIES GROUP EINDHOVEN BV
Netherlands
EU contribution
€ 94 948
Address
Achtseweg Noord 5 Ak-1 K113
5651 GG Eindhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
STMICROELECTRONICS SRL
Italy
EU contribution
€ 90 848
Address
Via C.olivetti 2
20864 Agrate Brianza
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
LAM
Italy
EU contribution
€ 55 920
Address
Viale Colleoni 11
20041 Agrate Brianza
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
STMICROELECTRONICS CROLLES 2 SAS
France
EU contribution
€ 150 167
Address
Rue Jean Monnet 850
38920 Crolles
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
SOLMATES BV
Netherlands
EU contribution
€ 149 590
Address
Auke Vleerstraat 3
7521 PE Enschede
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact