The technological objective of MONARCH is to produce the world's first scanning electron microscope (SEM) on-a-chip. Such an instrument would represent a step-change in electron beam (e-beam) technology comparable with the introduction of the silicon chip to electronics. This device will be orders of magnitude smaller than existing technology, would operate at lower voltages and have an order of magnitude higher resolution for a fraction of the cost of a current state-of-the-art SEM. It would provide the first instrument capable of rapidly scanning a surface layer and producing an image with elemental identification at atomic resolution.
This disruptive technology has dramatic implications for many sectors other than electron microscopy, including e-beam lithography, genetic sequencing, ultra-high density data storage and focussed ion beam milling. In particular it is expected to be a key enabling tool for the booming sectors of nanotechnology and MNEMS (micro-nano-electromechanical systems).
Field of science
- /natural sciences/physical sciences/optics/microscopy/electron microscopy
- /natural sciences/chemical sciences/inorganic chemistry/inorganic compounds
- /engineering and technology/nanotechnology
Call for proposal
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Funding SchemeCooperative - SMEs-Co-operative research contracts
7522 NB Enschede