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Ultra-bright nanoscale SEM-on-a-chip

Objective

The technological objective of MONARCH is to produce the world's first scanning electron microscope (SEM) on-a-chip. Such an instrument would represent a step-change in electron beam (e-beam) technology comparable with the introduction of the silicon chip to electronics. This device will be orders of magnitude smaller than existing technology, would operate at lower voltages and have an order of magnitude higher resolution for a fraction of the cost of a current state-of-the-art SEM. It would provide the first instrument capable of rapidly scanning a surface layer and producing an image with elemental identification at atomic resolution.

This disruptive technology has dramatic implications for many sectors other than electron microscopy, including e-beam lithography, genetic sequencing, ultra-high density data storage and focussed ion beam milling. In particular it is expected to be a key enabling tool for the booming sectors of nanotechnology and MNEMS (micro-nano-electromechanical systems).

Field of science

  • /natural sciences/physical sciences/optics/microscopy/electron microscopy
  • /natural sciences/chemical sciences/inorganic chemistry/inorganic compounds
  • /engineering and technology/nanotechnology

Call for proposal

FP6-2004-SME-COOP
See other projects for this call

Funding Scheme

Cooperative - SMEs-Co-operative research contracts
Leaflet | Map data © OpenStreetMap contributors, Credit: EC-GISCO, © EuroGeographics for the administrative boundaries

Coordinator

VIVID COMPONENTS LTD.
Address
23, Devon Square
Newton Abbot
United Kingdom

Participants (8)

CHALMERS TEKNISKA HOEGSKOLA AB
Sweden
Address
Kemivaegen 9
Goeteborg
CONCEPT TO VOLUME B.V.
Netherlands
Address
Colosseum 20
Enschede
NANOFACTORY INSTRUMENTS AB
Sweden
Address
Walleriusgatan 2
Goeteborg
NFAB LTD.
United Kingdom
Address
Optic Technium, Ffordd William Morgan, St. Asaph Business Park
St. Asaph
OMICRON NANO TECHNOLOGY GMBH
Germany
Address
Limburgerstrasse 75
Taunusstein
ROPER INDUSTRIES LTD.
United Kingdom
Address
Western Way
Bury St. Edmunds
UNIVERSITEIT TWENTE
Netherlands
Address
Drienerlolaan 5
7522 NB Enschede
UNIVERSITY OF SALFORD
United Kingdom
Address
The Crescent 43
Salford, Manchester