Micro-Optical MEMS, micro-mirrors and pico-projectors.
Lab4MEMS II will feature the Pilot Line for innovative technologies on advanced Micro-Opto-Electro-Mechanical Systems (MOEMS). This is not just a special class of MEMS systems in fact, but it deals with MEMS merged with Micro-optics, which involves sensing or manipulating optical signals on a very small size scale, using integrated mechanical, optical, and electrical systems. MOEMS includes a variety of devices including optical switch, array of micro-mirrors, optical cross-connect, lasers and micro lens amongst others. These devices are usually fabricated using micro-optics and standard micromachining technologies using materials like silicon, molybdenum (Mo), silicon dioxide, silicon nitride (Si3N4), piezo coating, etc.
The trend toward miniaturization and integration of conventional optical systems will accelerate the adoption of MOEMS technology in commercialization of many industrial components which are today’s most desirable elements of optical communication, i.e. MEMS-actuated micro optical mirrors, autofocus lens or 3D laser micro-scanners.
Field of science
- /engineering and technology/materials engineering/coating and films
- /natural sciences/chemical sciences/inorganic chemistry/inorganic compounds
- /natural sciences/physical sciences/optics/laser physics
Call for proposal
See other projects for this call
Funding SchemeJTI-CP-ENIAC - Joint Technology Initiatives - Collaborative Project (ENIAC)