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MOEMS:Micro-Optical MEMS, micro-mirrors and pico-projectors

Objective

Micro-Optical MEMS, micro-mirrors and pico-projectors.
Lab4MEMS II will feature the Pilot Line for innovative technologies on advanced Micro-Opto-Electro-Mechanical Systems (MOEMS). This is not just a special class of MEMS systems in fact, but it deals with MEMS merged with Micro-optics, which involves sensing or manipulating optical signals on a very small size scale, using integrated mechanical, optical, and electrical systems. MOEMS includes a variety of devices including optical switch, array of micro-mirrors, optical cross-connect, lasers and micro lens amongst others. These devices are usually fabricated using micro-optics and standard micromachining technologies using materials like silicon, molybdenum (Mo), silicon dioxide, silicon nitride (Si3N4), piezo coating, etc.
The trend toward miniaturization and integration of conventional optical systems will accelerate the adoption of MOEMS technology in commercialization of many industrial components which are today’s most desirable elements of optical communication, i.e. MEMS-actuated micro optical mirrors, autofocus lens or 3D laser micro-scanners.

Field of science

  • /engineering and technology/materials engineering/coating and films
  • /natural sciences/chemical sciences/inorganic chemistry/inorganic compounds
  • /natural sciences/physical sciences/optics/laser physics

Call for proposal

ENIAC-2013-2
See other projects for this call

Funding Scheme

JTI-CP-ENIAC - Joint Technology Initiatives - Collaborative Project (ENIAC)

Coordinator

STMICROELECTRONICS SRL
Address
Via C.olivetti 2
20864 Agrate Brianza
Italy
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EU contribution
€ 902 340
Administrative Contact

Participants (19)

POLITECNICO DI TORINO
Italy
EU contribution
€ 90 000
Address
Corso Duca Degli Abruzzi 24
10129 Torino
Activity type
Higher or Secondary Education Establishments
Administrative Contact
POLITECNICO DI MILANO
Italy
EU contribution
€ 75 000
Address
Piazza Leonardo Da Vinci 32
20133 Milano
Activity type
Higher or Secondary Education Establishments
Administrative Contact
CONSORZIO NAZIONALE INTERUNIVERSITARIO PER LA NANOELETTRONICA
Italy
EU contribution
€ 75 000
Address
Via Toffano 2
40125 Bologna
Activity type
Research Organisations
Administrative Contact
CONSIGLIO NAZIONALE DELLE RICERCHE
Italy
EU contribution
€ 67 500
Address
Piazzale Aldo Moro 7
00185 Roma
Activity type
Research Organisations
Administrative Contact
COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
France
EU contribution
€ 69 826,65
Address
Rue Leblanc 25
75015 Paris 15
Activity type
Research Organisations
Administrative Contact
ARKEMA FRANCE SA
France
EU contribution
€ 139 513,05
Address
Rue Estienne D Orves
92700 Colombes
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
STMicroelectronics Ltd.
Malta
EU contribution
€ 720 000
Address
Industry Road -
KKP9042 Kirkop
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
UNIVERSITA TA MALTA
Malta
EU contribution
€ 56 470,50
Address
University Campus, Tal-qroqq
2080 Msida
Activity type
Higher or Secondary Education Establishments
Administrative Contact
OKMETIC OY
Finland
EU contribution
€ 165 000
Address
Piitie 2
01510 Vantaa
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Murata Electronics Oy
Finland
EU contribution
€ 75 000
Address
Myllynkivenkuja 6
01621 Vantaa
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
VTT MEMSFAB OY
Finland
EU contribution
€ 42 000
Address
Tietotie 3
02044 VTT Espoo
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
TEKNOLOGIAN TUTKIMUSKESKUS VTT
Finland
EU contribution
€ 120 000
Address
Tekniikantie 4 A
02044 VTT Espoo
Activity type
Research Organisations
Administrative Contact
AALTO KORKEAKOULUSAATIO SR
Finland
EU contribution
€ 50 400
Address
Otakaari 1
02150 Espoo
Activity type
Higher or Secondary Education Establishments
Administrative Contact
ICOS VISION SYSTEMS NV
Belgium
EU contribution
€ 377 276,25
Address
Esperantolaan 8C
3001 Heverlee
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
UNIVERSITATEA POLITEHNICA DIN BUCURESTI
Romania
EU contribution
€ 79 411,76
Address
Splaiul Independentei 313 Sect 6
060042 Bucharest
Activity type
Higher or Secondary Education Establishments
Administrative Contact
SIEC BADAWCZA LUKASIEWICZ - INSTYTUT TECHNOLOGII ELEKTRONOWEJ
Poland
EU contribution
€ 48 386,25
Address
Ulica Aleja Lotnikow 32-46
02668 Warszawa
Activity type
Research Organisations
Administrative Contact
STIFTELSEN SINTEF
Norway
EU contribution
€ 122 857,20
Address
Strindveien 4
7034 Trondheim
Activity type
Research Organisations
Administrative Contact
POLEWALL AS
Norway
EU contribution
€ 60 570,90
Address
Vige Havnevei 78
4633 Kristiansand
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
BESI AUSTRIA GMBH
Austria
EU contribution
€ 225 042,45
Address
Innstrasse 16
6240 Radfeld
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact