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Pilot Line For Self Assembly Copolymer Delivery

Publications

Recent Achievements in Sub-10 nm DSA Lithography for Line/Space Patterning

Author(s): Kui Xu; Marta Fernández-Regúlez; Marc Zelsmann; Antoine Legrain; Mary Ann Hockey; Laura Evangelio; Guillaume Fleury; Christophe Navarro; Xavier Chevalier; Ian Cayrefourcq; Fumi Ariura; Georges Hadziioannou; Francesc Pérez-Murano; Laurent Pain; Celia Nicolet; Raluca Tiron; Ahmed Gharbi; Muhammad Waseem Mumtaz
Published in: HAL CCSD ISSN: 0914-9244 2017
Permanent ID: Digital Object Identifier:10.2494/photopolymer.30.69

Surface relief gratings formed by microphase-separated disperse red 1 acrylate-containing diblock copolymers

Author(s): Spiridon, Mitica Cezar; Aissou, Karim; Mumtaz, Muhammad; Brochon, Cyril; Cloutet, Eric; Fleury, Guillaume; Hadziioannou, Georges
Published in: Elsevier BV Polymer, Elsevier, 2018, 137, pp.378-384. ⟨10.1016/j.polymer.2018.01.032⟩ 2018
Permanent ID: Digital Object Identifier:10.1016/j.polymer.2018.01.032