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Pilot Line For Self Assembly Copolymer Delivery

Objective

The PLACYD project aims at strengthening the European leadership in the field of advanced lithography. The consortiums gathers the main European Rnull actors along the whole value chain (Material suppliers, equipment suppliers, semiconductor companies, CAD companies, research laboratories) in order to bring the key materials, processes and design tools for Directed Self Assembly (DSA) Lithography at the required industrial maturity for its introduction at the 1Xnode.

PLACYD is focused on challenges that must be addressed to
ensure the successful development and integration of Directed Self Assembly Lithography technology to support a high-volume integrated circuit (IC) manufacturing process and prepare the next generation nodes.

PLACYD will consist in defining and assembling the first pilot line to produce materials at the heart of the DSA technology. This will include a dedicated material synthesis and formulation pilot line that, as well as all the monitoring and characterisation means:
? to define the material specifications and prepare its introduction in IC fabs.
? to carry out statistical studies in 300mm line environment to understand correlations between material characteristics and application performances (CDU vs MW dispersity, Defectivity vs composition…)
? to demonstrate DSA technology maturity and compatibility to high volume IC manufacturing,

PLACYD will also define and qualify design tools that will allow designing guiding structure properly.Initially PLACYD will focus on contact shrink and contact doubling application. The project will deliver a Design module through its CAD partner as well as actual electrical demonstrators through its IC manufacturer partners.

Call for proposal

ENIAC-2013-2
See other projects for this call

Funding Scheme

JTI-CP-ENIAC - Joint Technology Initiatives - Collaborative Project (ENIAC)

Coordinator

ARKEMA FRANCE SA
Address
Rue Estienne D Orves
92700 Colombes
France
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EU contribution
€ 763 002
Administrative Contact

Participants (10)

COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
France
EU contribution
€ 394 721,05
Address
Rue Leblanc 25
75015 Paris 15
Activity type
Research Organisations
Administrative Contact
STMICROELECTRONICS CROLLES 2 SAS
France
EU contribution
€ 66 943,76
Address
Rue Jean Monnet 850
38920 Crolles
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
APPLIED MATERIALS ISRAEL LTD
Israel
EU contribution
€ 549 000
Address
Oppenheimer Street 9
76705 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
ASML NETHERLANDS B.V.
Netherlands
EU contribution
€ 94 500
Address
De Run 6501
5504DR Veldhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
MENTOR GRAPHICS DEVELOPMENT CROLLES SARL
France
EU contribution
€ 124 199,28
Address
Rue Blaise Pascal 110 Immeuble Leo Batiment B
38330 Montbonnot Saint Martin
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
AGENCIA ESTATAL CONSEJO SUPERIOR DEINVESTIGACIONES CIENTIFICAS
Spain
EU contribution
€ 34 464,60
Address
Calle Serrano 117
28006 Madrid
Activity type
Research Organisations
Administrative Contact
UNIVERSITY COLLEGE CORK - NATIONAL UNIVERSITY OF IRELAND, CORK
Ireland
EU contribution
€ 43 875
Address
Western Road
T12 YN60 Cork
Activity type
Higher or Secondary Education Establishments
Administrative Contact
IMS bordeaux
France
EU contribution
€ 45 002,25
Address
351 Cours De La Liberation
33405 Talence
Activity type
Higher or Secondary Education Establishments
Administrative Contact
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS
France
EU contribution
€ 96 818,98
Address
Rue Michel Ange 3
75794 Paris
Activity type
Other
Administrative Contact
INTEL RESEARCH AND INNOVATION IRELAND LIMITED
Ireland
EU contribution
€ 26 961,90
Address
Collinstown Industrial Estate
. Leixlip Kildare
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact