Objective The objective of the 3DAM project is to develop a new generation of metrology and characterization tools and methodologies enabling the development of the next semiconductor technology nodes. As nano-electronics technology is moving beyond the boundaries of (strained) silicon in planar or finFETs, new 3D device architectures and new materials bring major metrology and characterization challenges which cannot be met by pushing the present techniques to their limits. 3DAM will be a path-finding project which supports and complements several existing and future ECSEL pilot-line projects and is linked to the MASP area 7.1 (subsection More Moore). Innovative demonstrators and methodologies will be built and evaluated within the themes of metrology and characterization of 3D device architectures and new materials, across the full IC manufacturing cycle from Front to Back-End-Of-Line. 3D structural metrology and defect analysis techniques will be developed and correlated to address challenges around 3D CD, strain and crystal defects at the nm scale. 3D compositional analysis and electrical properties will be investigated with special attention to interfaces, alloys and 2D materials. The project will develop new workflows combining different technologies for more reliable and faster results; fit for use in future semiconductor processes.The consortium includes major European semiconductor equipment companies in the area of metrology and characterization. The link to future needs of the industry, as well as critical evaluation of concepts and demonstrators, is ensured by the participation of IMEC and LETI. The project will directly increase the competitiveness of the strong Europe-based semiconductor Equipment industry. Closely connected European IC manufacturers will benefit by accelerated R&D and process ramp-up. The project will generate technologies essential for future semiconductor processes and for the applications enabled by the new technology nodes. Fields of science engineering and technologynanotechnologynano-materialstwo-dimensional nanostructuresnatural sciencesphysical sciencesopticsmicroscopynatural sciencesphysical scienceselectromagnetism and electronicssemiconductivitynatural scienceschemical sciencesinorganic chemistrymetalloidsengineering and technologynanotechnologynanoelectronics Programme(s) H2020-EU.2.1.1. - INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies - Information and Communication Technologies (ICT) Main Programme H2020-EU.2.1.1.7. - ECSEL Topic(s) ECSEL-06-2015 - Semicondutor Process, Equipment and Materials Call for proposal H2020-ECSEL-2015-1-RIA-two-stage-Master See other projects for this call Sub call H2020-ECSEL-2015-1-RIA-two-stage Funding Scheme ECSEL-RIA - ECSEL Research and Innovation Action Coordinator FEI ELECTRON OPTICS BV Net EU contribution € 1 110 812,50 Address ACHTSEWEG NOORD GEBOUW AAE 5 5651 GG Eindhoven Netherlands See on map Region Zuid-Nederland Noord-Brabant Zuidoost-Noord-Brabant Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 4 443 250,00 Participants (18) Sort alphabetically Sort by Net EU contribution Expand all Collapse all APPLIED MATERIALS ISRAEL LTD Israel Net EU contribution € 740 625,00 Address OPPENHEIMER STREET 9 76705 Rehovot See on map Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 2 962 500,00 INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM Belgium Net EU contribution € 873 666,00 Address KAPELDREEF 75 3001 Leuven See on map Region Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven Activity type Research Organisations Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 2 184 165,00 NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO Netherlands Net EU contribution € 628 813,00 Address ANNA VAN BUERENPLEIN 1 2595 DA Den Haag See on map Region West-Nederland Zuid-Holland Agglomeratie ’s-Gravenhage Activity type Research Organisations Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 1 572 032,50 NOVA LTD Israel Net EU contribution € 600 000,00 Address 5 DAVID FIKES ST 76100 REHOVOT See on map Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 2 400 000,00 BRUKER TECHNOLOGIES LTD Israel Net EU contribution € 276 882,11 Address 6 HAMECHKAR STREET RAMAT GAVRIEL INDUSTRIAL ZONE 2306990 Migdal Haemek See on map Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 1 524 375,00 Third-party Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure. Jordan Valley Semiconductors UK Ltd United Kingdom Net EU contribution € 81 211,64 Address BELMONT BUSINESS PARK BELMONT DH1 1TW Durham See on map SME The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed. Yes Region North East (England) Tees Valley and Durham Durham CC Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 324 846,56 Third-party Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure. BRUKER AXS GMBH Germany Net EU contribution € 23 000,00 Address OSTLICHE RHEINBRUCKENSTRASSE 49 76187 Karlsruhe See on map Region Baden-Württemberg Karlsruhe Karlsruhe, Stadtkreis Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 92 000,00 COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES France Net EU contribution € 525 062,50 Address RUE LEBLANC 25 75015 PARIS 15 See on map Region Ile-de-France Ile-de-France Paris Activity type Research Organisations Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 1 312 656,25 ATTOLIGHT SA Switzerland Net EU contribution € 0,00 Address EPFL INNOVATION PARK BUILDING D 1015 Lausanne See on map SME The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed. Yes Region Schweiz/Suisse/Svizzera Région lémanique Vaud Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 715 000,00 SEMILAB FELVEZETO FIZIKAI LABORATORIUM ZARTKORUEN MUKODO RESZVENYTARSASAG Hungary Net EU contribution € 531 250,00 Address PRIELLE KORNELIA UTCA 2 1117 BUDAPEST See on map Region Közép-Magyarország Budapest Budapest Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 2 125 000,00 CAMECA SAS France Net EU contribution € 344 562,50 Address QUAI DES GRESILLONS 23/29 92230 Gennevilliers See on map Region Ile-de-France Ile-de-France Hauts-de-Seine Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 1 378 250,00 ADAMA INNOVATIONS LIMITED Participation ended Ireland Net EU contribution € 90 810,38 Address CRANN TRINITY COLLEGE DUBLIN 2 Dublin See on map SME The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed. Yes Region Ireland Northern and Western Border Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 302 701,25 FEI SAS France Net EU contribution € 207 500,00 Address IMPASSE RUDOLF DIESEL 3 33700 Merignac See on map Region Nouvelle-Aquitaine Aquitaine Gironde Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 830 000,00 STMICROELECTRONICS CROLLES 2 SAS France Net EU contribution € 0,00 Address RUE JEAN MONNET 850 38920 Crolles See on map Region Auvergne-Rhône-Alpes Rhône-Alpes Isère Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 143 750,00 TECHNISCHE UNIVERSITEIT EINDHOVEN Netherlands Net EU contribution € 145 179,50 Address GROENE LOPER 3 5612 AE Eindhoven See on map Region Zuid-Nederland Noord-Brabant Zuidoost-Noord-Brabant Activity type Higher or Secondary Education Establishments Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 362 948,75 CAPRES AS Denmark Net EU contribution € 77 474,25 Address DIPLOMVEJ 373 2800 KGS. LYNGBY See on map SME The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed. Yes Region Danmark Hovedstaden Københavns omegn Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 258 247,50 DANMARKS TEKNISKE UNIVERSITET Denmark Net EU contribution € 191 258,50 Address ANKER ENGELUNDS VEJ 101 2800 Kongens Lyngby See on map Region Danmark Hovedstaden Københavns omegn Activity type Higher or Secondary Education Establishments Links Contact the organisation Opens in new window Website Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 478 146,25 APPLIED MATERIALS FRANCE France Net EU contribution € 15 718,75 Address 864 CHEMIN DES FONTAINES 38190 Bernin See on map Region Auvergne-Rhône-Alpes Rhône-Alpes Isère Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Links Contact the organisation Opens in new window Participation in EU R&I programmes Opens in new window HORIZON collaboration network Opens in new window Total cost € 62 875,00
