Low energy ELEctron driven chemistry for the advantage of emerging NAno-fabrication methods

Deliverables

Documents, reports (12)

Two network-wide Personal Skills Training Schools

Two network-wide Personal Skills Training Schools (nw-PSTS) have taken place (the first one in M12 and the second one in M24) and reports have been compiled. Both reports will be submitted together in M24.

Three network-wide Technical Training Schools

Three network-wide Technical Training Schools (nw-TTS) have taken place (in M9, M20 and M26) and reports have been compiled. All three reports will be submitted together in M26.

WP6 Secondments I

All secondments planned for ESR6, ESR10, ESR12, ESR13, ESR14 and ESR15 before M18 have been completed.

Equal Opportunity Declaration

The Equal Opportunity Declaration has been formulated and published on ELENA´s web site.

Outreach and Dissemination activity plan - Revision I

The first revision of the Outreach and Dissemination Plan has been performed and a report on Outreach and Dissemination activities in M01 - M12 has been compiled.

WP4 Secondments I

All secondments planned for ESR5, ESR7 and ESR11 before M18 have been completed.

Outreach and Dissemination Board

The Outreach and Dissemination Board (ODB) has been established and is operational. An initial Outreach and Dissemination plan is in place.

WP5 Secondments I

All secondments planned for ESR1, ESR2, ESR3, ESR4, ESR8 and ESR9 before M18 have been completed.

Documentation of recruitment

Documentation of the ESR recruitment process. This includes statistics on the distribution of applicants, conduct of the selection process, interview forms and selection criteria.

Kick-off meeting and meeting report

The kick-off meeting is intended to be early November which places it in M2. The intention is to co-locate the kick-off meeting with the workshop on Low Energy Electrons: Lithography, Imaging and Soft Matter (LEELIS-II) hosted by ARCNL in Amsterdam 10-11 November 2016. Deliverable: A report with an overview of the kick-off meeting, its agenda, participants, main decisions made.

Outreach and Dissemination activity plan - Revision II

The second revision of the Outreach and Dissemination Plan has been performed and a report on Outreach and Dissemination activities in M13 - M24 has been compiled.

Supervisory Board

The Supervisory Board has been established and is operational.

Open Research Data Pilot (4)

Data Review for WP6

As an integral part of the research and training part all ESRs participate actively in the construction of ELENA's database. This activity begins on day one after recruitment and constitutes, through a critical literature review, the extraction of data and organisation of that data into the ELENA database throughout. In this context ESRs allocated to WP6 initially review existing electron molecule interaction data for entries into ELENA data-base (FEBID and EUV). A complete compilation of data existing before the start date of ELANA is expected to be completed at the due date in M12.

Data Management Plan

A Data Management Plan has been formulated.

Data Review for WP4

As an integral part of the research and training part all ESRs participate actively in the construction of ELENA's database. This activity begins on day one after recruitment and constitutes, through a critical literature review, the extraction of data and organisation of that data into the ELENA database throughout. In this context ESRs allocated to WP4 initially review data for existing and potential FEBID precursor and EUVL resist material for entrance in to ELENAs database. A complete compilation of data existing before the start date of ELENA is expected to be completed at the due date in M12.

Data Review for WP5

As an integral part of the research and training part all ESRs participate actively in the construction of ELENA's database. This activity begins on day one after recruitment and constitutes, through a critical literature review, the extraction of data and organisation of that data into the ELENA database throughout. In this context ESRs allocated to WP5 initially review data for existing electron molecule interaction data for entries into ELENAs data-base (FEBID and EUV). A complete compilation of data existing before the start date of ELANA is expected to be completed at the due date in M12.

Websites, patent fillings, videos etc. (1)

Establish ELENA website

Establish a website for public view and internal usage for the ELENA project. This website will, among other things, be used to develop an international community of participants with the exchange of ideas, experiences and perspectives between ESRs.

Publications

Peer reviewed articles (29)

Controlled Electron‐Induced Fabrication of Metallic Nanostructures on 1 nm Thick Membranes

Author(s): Christian Preischl, Linh Hoang Le, Elif Bilgilisoy, Florian Vollnhals, Armin Gölzhäuser, Hubertus Marbach
Published in: Small, Issue 16/45, 2020, Page(s) 2003947, ISSN 1613-6810
DOI: 10.1002/smll.202003947

XUV Induced Bleaching of a Tin Oxo Cage Photoresist Studied by High Harmonic Absorption Spectroscopy

Author(s): Najmeh Sadegh, Maarten van der Geest, Jarich Haitjema, Filippo Campi, Sonia Castellanos, Peter M. Kraus, Albert M. Brouwer
Published in: Journal of Photopolymer Science and Technology, Issue 33/2, 2020, Page(s) 145-151, ISSN 0914-9244
DOI: 10.2494/photopolymer.33.145

High-Purity Copper Structures from a Perfluorinated Copper Carboxylate Using Focused Electron Beam Induced Deposition and Post-Purification

Author(s): Luisa Berger, Jakub Jurczyk, Katarzyna Madajska, Thomas Edward James Edwards, Iwona Szymańska, Patrik Hoffmann, Ivo Utke
Published in: ACS Applied Electronic Materials, Issue 2/7, 2020, Page(s) 1989-1996, ISSN 2637-6113
DOI: 10.1021/acsaelm.0c00282

Surface Reactions of Low-Energy Argon Ions with Organometallic Precursors

Author(s): Elif Bilgilisoy, Rachel M. Thorman, Jo-Chi Yu, Timothy B. Dunn, Hubertus Marbach, Lisa McElwee-White, D. Howard Fairbrother
Published in: The Journal of Physical Chemistry C, Issue 124/45, 2020, Page(s) 24795-24808, ISSN 1932-7447
DOI: 10.1021/acs.jpcc.0c07269

Ultrathin Carbon Nanomembranes from 5,10,15,20-Tetraphenylporphyrin: Electron Beam Induced Fabrication and Functionalization via Focused Electron Beam Induced Processing

Author(s): Christian Preischl, Markus Rohdenburg, Elif Bilgilisoy, René Cartaya, Petra Swiderek, Hubertus Marbach
Published in: The Journal of Physical Chemistry C, Issue 124/51, 2020, Page(s) 28335-28344, ISSN 1932-7447
DOI: 10.1021/acs.jpcc.0c09694

Extreme Ultraviolet-Printability and Mechanistic Studies of Engineered Hydrogen Silsesquioxane Photoresist Systems

Author(s): Ashish Rathore, Ivan Pollentier, Maicol Cipriani, Harpreet Singh, Danilo De Simone, Oddur Ingólfsson, Stefan De Gendt
Published in: ACS Applied Polymer Materials, Issue 3/4, 2021, Page(s) 1964-1972, ISSN 2637-6105
DOI: 10.1021/acsapm.1c00018

Gold(I) N-heterocyclic carbene precursors for focused electron beam-induced deposition

Author(s): Cristiano Glessi, Aya Mahgoub, Cornelis W Hagen, Mats Tilset
Published in: Beilstein Journal of Nanotechnology, Issue 12, 2021, Page(s) 257-269, ISSN 2190-4286
DOI: 10.3762/bjnano.12.21

Efficient NH3-based process to remove chlorine from electron beam deposited ruthenium produced from (η3-C3H5)Ru(CO)3Cl

Author(s): Markus Rohdenburg, Hannah Boeckers, Christopher R. Brewer, Lisa McElwee-White, Petra Swiderek
Published in: Scientific Reports, Issue 10/1, 2020, ISSN 2045-2322
DOI: 10.1038/s41598-020-67803-y

Electron-Induced Reactions of Ru(CO) 4 I 2 : Gas Phase, Surface, and Electron Beam-Induced Deposition

Author(s): Rachel M. Thorman, Pernille A. Jensen, Jo-Chi Yu, Scott J. Matsuda, Lisa McElwee-White, Oddur Ingólfsson, D. Howard Fairbrother
Published in: The Journal of Physical Chemistry C, Issue 124/19, 2020, Page(s) 10593-10604, ISSN 1932-7447
DOI: 10.1021/acs.jpcc.0c01801

Effect of molecular weight on the EUV-printability of main chain scission type polymers

Author(s): Ashish Rathore, Ivan Pollentier, Harpreet Singh, Roberto Fallica, Danilo De Simone, Stefan De Gendt
Published in: Journal of Materials Chemistry C, Issue 8/17, 2020, Page(s) 5958-5966, ISSN 2050-7534
DOI: 10.1039/c9tc06482f

Dissociation of the FEBID precursor cis -Pt(CO) 2 Cl 2 driven by low-energy electrons

Author(s): Filipe Ferreira da Silva, Rachel M. Thorman, Ragnar Bjornsson, Hang Lu, Lisa McElwee-White, Oddur Ingólfsson
Published in: Physical Chemistry Chemical Physics, Issue 22/11, 2020, Page(s) 6100-6108, ISSN 1463-9076
DOI: 10.1039/c9cp06633k

Electron-induced fragmentation mechanisms in organic monomers and their implications for photoresist optimization for EUV lithography

Author(s): Ashish Rathore, Maicol Cipriani, Ching-Chung Huang, Lionel Amiaud, Céline Dablemont, Anne Lafosse, Oddur Ingólfsson, Danilo De Simone, Stefan De Gendt
Published in: Physical Chemistry Chemical Physics, Issue 23/15, 2021, Page(s) 9228-9234, ISSN 1463-9076
DOI: 10.1039/d1cp00065a

Vacuum versus ambient pressure inert gas thermogravimetry: a study of silver carboxylates

Author(s): Jakub Jurczyk, Cristiano Glessi, Katarzyna Madajska, Luisa Berger, Jeroen Ingolf Ketele Nyrud, Iwona Szymańska, Czesław Kapusta, Mats Tilset, Ivo Utke
Published in: Journal of Thermal Analysis and Calorimetry, 2021, ISSN 1388-6150
DOI: 10.1007/s10973-021-10616-6

Organometallic chemistry in aqua regia : metal and ligand based oxidations of (NHC)AuCl complexes

Author(s): Volodymyr Levchenko, Cristiano Glessi, Sigurd Øien-Ødegaard, Mats Tilset
Published in: Dalton Transactions, Issue 49/11, 2020, Page(s) 3473-3479, ISSN 1477-9226
DOI: 10.1039/c9dt04472h

Direct Electron Beam Writing of Silver-Based Nanostructures

Author(s): Katja Höflich, Jakub Jurczyk, Yucheng Zhang, Marcos V. Puydinger dos Santos, Maximilian Götz, Carlos Guerra-Nuñez, James P. Best, Czeslaw Kapusta, Ivo Utke
Published in: ACS Applied Materials & Interfaces, Issue 9/28, 2017, Page(s) 24071-24077, ISSN 1944-8244
DOI: 10.1021/acsami.7b04353

Exploring the fabrication and transfer mechanism of metallic nanostructures on carbon nanomembranes via focused electron beam induced processing

Author(s): Christian Preischl, Linh Hoang Le, Elif Bilgilisoy, Armin Gölzhäuser, Hubertus Marbach
Published in: Beilstein Journal of Nanotechnology, Issue 12, 2021, Page(s) 319-329, ISSN 2190-4286
DOI: 10.3762/bjnano.12.26

Gas-assisted silver deposition with a focused electron beam

Author(s): Luisa Berger, Katarzyna Madajska, Iwona B Szymanska, Katja Höflich, Mikhail N Polyakov, Jakub Jurczyk, Carlos Guerra-Nuñez, Ivo Utke
Published in: Beilstein Journal of Nanotechnology, Issue 9, 2018, Page(s) 224-232, ISSN 2190-4286
DOI: 10.3762/bjnano.9.24

Towards the third dimension in direct electron beam writing of silver

Author(s): Katja Höflich, Jakub Mateusz Jurczyk, Katarzyna Madajska, Maximilian Götz, Luisa Berger, Carlos Guerra-Nuñez, Caspar Haverkamp, Iwona Szymanska, Ivo Utke
Published in: Beilstein Journal of Nanotechnology, Issue 9, 2018, Page(s) 842-849, ISSN 2190-4286
DOI: 10.3762/bjnano.9.78

Surface-Anchored Metal–Organic Frameworks as Versatile Resists for Gas-Assisted E-Beam Lithography: Fabrication of Sub-10 Nanometer Structures

Author(s): Martin Drost, Fan Tu, Luisa Berger, Christian Preischl, Wencai Zhou, Hartmut Gliemann, Christof Wöll, Hubertus Marbach
Published in: ACS Nano, Issue 12/4, 2018, Page(s) 3825-3835, ISSN 1936-0851
DOI: 10.1021/acsnano.8b01071

Rapid Water Permeation Through Carbon Nanomembranes with Sub-Nanometer Channels

Author(s): Yang Yang, Petr Dementyev, Niklas Biere, Daniel Emmrich, Patrick Stohmann, Riko Korzetz, Xianghui Zhang, André Beyer, Sascha Koch, Dario Anselmetti, Armin Gölzhäuser
Published in: ACS Nano, Issue 12/5, 2018, Page(s) 4695-4701, ISSN 1936-0851
DOI: 10.1021/acsnano.8b01266

Electron-driven and thermal chemistry during water-assisted purification of platinum nanomaterials generated by electron beam induced deposition

Author(s): Ziyan Warneke, Markus Rohdenburg, Jonas Warneke, Janina Kopyra, Petra Swiderek
Published in: Beilstein Journal of Nanotechnology, Issue 9, 2018, Page(s) 77-90, ISSN 2190-4286
DOI: 10.3762/bjnano.9.10

Electron Beam-Induced Surface Activation of Metal–Organic Framework HKUST-1: Unraveling the Underlying Chemistry

Author(s): Kai Ahlenhoff, Christian Preischl, Petra Swiderek, Hubertus Marbach
Published in: The Journal of Physical Chemistry C, Issue 122/46, 2018, Page(s) 26658-26670, ISSN 1932-7447
DOI: 10.1021/acs.jpcc.8b06226

Focused Electron Beam-Induced Deposition and Post-Growth Purification Using the Heteroleptic Ru Complex (η 3 -C 3 H 5 )Ru(CO) 3 Br

Author(s): Jakub Jurczyk, Christopher R. Brewer, Olivia M. Hawkins, Mikhail N. Polyakov, Czeslaw Kapusta, Lisa McElwee-White, Ivo Utke
Published in: ACS Applied Materials & Interfaces, Issue 11/31, 2019, Page(s) 28164-28171, ISSN 1944-8244
DOI: 10.1021/acsami.9b07634

Cisplatin as a Potential Platinum Focused Electron Beam Induced Deposition Precursor: NH 3 Ligands Enhance the Electron-Induced Removal of Chlorine

Author(s): Markus Rohdenburg, Petra Martinović, Kai Ahlenhoff, Sascha Koch, Daniel Emmrich, Armin Gölzhäuser, Petra Swiderek
Published in: The Journal of Physical Chemistry C, Issue 123/35, 2019, Page(s) 21774-21787, ISSN 1932-7447
DOI: 10.1021/acs.jpcc.9b05756

Mechanical Properties of 3D Nanostructures Obtained by Focused Electron/Ion Beam-Induced Deposition: A Review

Author(s): Ivo Utke, Johann Michler, Robert Winkler, Harald Plank
Published in: Micromachines, Issue 11/4, 2020, Page(s) 397, ISSN 2072-666X
DOI: 10.3390/mi11040397

Metals by Micro‐Scale Additive Manufacturing: Comparison of Microstructure and Mechanical Properties

Author(s): Alain Reiser, Lukas Koch, Kathleen A. Dunn, Toshiki Matsuura, Futoshi Iwata, Ofer Fogel, Zvi Kotler, Nanjia Zhou, Kristin Charipar, Alberto Piqué, Patrik Rohner, Dimos Poulikakos, Sanghyeon Lee, Seung Kwon Seol, Ivo Utke, Cathelijn Nisselroy, Tomaso Zambelli, Jeffrey M. Wheeler, Ralph Spolenak
Published in: Advanced Functional Materials, 2020, Page(s) 1910491, ISSN 1616-301X
DOI: 10.1002/adfm.201910491

Extreme Ultraviolet Photoelectron Spectroscopy on Fluorinated Monolayers: towards Nanolithography on Monolayers

Author(s): Olivier Lugier, Alessandro Troglia, Najmeh Sadegh, Luc van Kessel, Roland Bliem, Nicola Mahne, Stefano Nannarone, Sonia Castellanos
Published in: Journal of Photopolymer Science and Technology, Issue 33/2, 2020, Page(s) 229-234, ISSN 0914-9244
DOI: 10.2494/photopolymer.33.229

High Sensitivity of Fluorine Gas-Assisted FIB-TOF-SIMS for Chemical Characterization of Buried Sublayers in Thin Films

Author(s): Agnieszka Priebe, Laszlo Pethö, Emese Huszar, Tianle Xie, Ivo Utke, Johann Michler
Published in: ACS Applied Materials & Interfaces, Issue 13/13, 2021, Page(s) 15890-15900, ISSN 1944-8244
DOI: 10.1021/acsami.1c01627

Smooth or not: Robust fused silica micro-components by femtosecond-laser-assisted etching

Author(s): Remo N. Widmer, David Bischof, Jakub Jurczyk, Markus Michler, Jakob Schwiedrzik, Johann Michler
Published in: Materials & Design, Issue 204, 2021, Page(s) 109670, ISSN 0264-1275
DOI: 10.1016/j.matdes.2021.109670

Conference proceedings (2)

Development of main chain scission type photoresists for EUV lithography

Author(s): Akihide Shirotori, Yannick Vesters, Manabu Hoshino, Ashish Rathore, Danilo De Simone, Geert Vandenberghe, Hirokazu Matsumoto
Published in: International Conference on Extreme Ultraviolet Lithography 2019, 2019, Page(s) 17
DOI: 10.1117/12.2536348

Unraveling the role of photons and electrons upon their chemical interaction with photoresist during EUV exposure

Author(s): Yannick Vesters, Atish Rathore, Pieter Vanelderen, John Petersen, Danilo De Simone, Geert Vandenberghe, Ivan Pollentier
Published in: Advances in Patterning Materials and Processes XXXV, 2018, Page(s) 11
DOI: 10.1117/12.2299593