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Low energy ELEctron driven chemistry for the advantage of emerging NAno-fabrication methods

Deliverables

Two network-wide Personal Skills Training Schools

Two network-wide Personal Skills Training Schools (nw-PSTS) have taken place (the first one in M12 and the second one in M24) and reports have been compiled. Both reports will be submitted together in M24.

Three network-wide Technical Training Schools

Three network-wide Technical Training Schools (nw-TTS) have taken place (in M9, M20 and M26) and reports have been compiled. All three reports will be submitted together in M26.

WP6 Secondments I

All secondments planned for ESR6, ESR10, ESR12, ESR13, ESR14 and ESR15 before M18 have been completed.

Equal Opportunity Declaration

The Equal Opportunity Declaration has been formulated and published on ELENA´s web site.

Outreach and Dissemination activity plan - Revision I

The first revision of the Outreach and Dissemination Plan has been performed and a report on Outreach and Dissemination activities in M01 - M12 has been compiled.

WP4 Secondments I

All secondments planned for ESR5, ESR7 and ESR11 before M18 have been completed.

Outreach and Dissemination Board

The Outreach and Dissemination Board (ODB) has been established and is operational. An initial Outreach and Dissemination plan is in place.

WP5 Secondments I

All secondments planned for ESR1, ESR2, ESR3, ESR4, ESR8 and ESR9 before M18 have been completed.

Documentation of recruitment

Documentation of the ESR recruitment process. This includes statistics on the distribution of applicants, conduct of the selection process, interview forms and selection criteria.

Kick-off meeting and meeting report

The kick-off meeting is intended to be early November which places it in M2. The intention is to co-locate the kick-off meeting with the workshop on Low Energy Electrons: Lithography, Imaging and Soft Matter (LEELIS-II) hosted by ARCNL in Amsterdam 10-11 November 2016. Deliverable: A report with an overview of the kick-off meeting, its agenda, participants, main decisions made.

Outreach and Dissemination activity plan - Revision II

The second revision of the Outreach and Dissemination Plan has been performed and a report on Outreach and Dissemination activities in M13 - M24 has been compiled.

Supervisory Board

The Supervisory Board has been established and is operational.

Data Review for WP6

As an integral part of the research and training part all ESRs participate actively in the construction of ELENA's database. This activity begins on day one after recruitment and constitutes, through a critical literature review, the extraction of data and organisation of that data into the ELENA database throughout. In this context ESRs allocated to WP6 initially review existing electron molecule interaction data for entries into ELENA data-base (FEBID and EUV). A complete compilation of data existing before the start date of ELANA is expected to be completed at the due date in M12.

Data Management Plan

A Data Management Plan has been formulated.

Data Review for WP4

As an integral part of the research and training part all ESRs participate actively in the construction of ELENA's database. This activity begins on day one after recruitment and constitutes, through a critical literature review, the extraction of data and organisation of that data into the ELENA database throughout. In this context ESRs allocated to WP4 initially review data for existing and potential FEBID precursor and EUVL resist material for entrance in to ELENAs database. A complete compilation of data existing before the start date of ELENA is expected to be completed at the due date in M12.

Data Review for WP5

As an integral part of the research and training part all ESRs participate actively in the construction of ELENA's database. This activity begins on day one after recruitment and constitutes, through a critical literature review, the extraction of data and organisation of that data into the ELENA database throughout. In this context ESRs allocated to WP5 initially review data for existing electron molecule interaction data for entries into ELENAs data-base (FEBID and EUV). A complete compilation of data existing before the start date of ELANA is expected to be completed at the due date in M12.

Establish ELENA website

Establish a website for public view and internal usage for the ELENA project. This website will, among other things, be used to develop an international community of participants with the exchange of ideas, experiences and perspectives between ESRs.

Searching for OpenAIRE data...

Publications

Towards the third dimension in direct electron beam writing of silver

Author(s): Katja Höflich, Jakub Mateusz Jurczyk, Katarzyna Madajska, Maximilian Götz, Luisa Berger, Carlos Guerra-Nuñez, Caspar Haverkamp, Iwona Szymanska, Ivo Utke
Published in: Beilstein Journal of Nanotechnology, Issue 9, 2018, Page(s) 842-849, ISSN 2190-4286
DOI: 10.3762/bjnano.9.78

Surface-Anchored Metal–Organic Frameworks as Versatile Resists for Gas-Assisted E-Beam Lithography: Fabrication of Sub-10 Nanometer Structures

Author(s): Martin Drost, Fan Tu, Luisa Berger, Christian Preischl, Wencai Zhou, Hartmut Gliemann, Christof Wöll, Hubertus Marbach
Published in: ACS Nano, Issue 12/4, 2018, Page(s) 3825-3835, ISSN 1936-0851
DOI: 10.1021/acsnano.8b01071

Rapid Water Permeation Through Carbon Nanomembranes with Sub-Nanometer Channels

Author(s): Yang Yang, Petr Dementyev, Niklas Biere, Daniel Emmrich, Patrick Stohmann, Riko Korzetz, Xianghui Zhang, André Beyer, Sascha Koch, Dario Anselmetti, Armin Gölzhäuser
Published in: ACS Nano, Issue 12/5, 2018, Page(s) 4695-4701, ISSN 1936-0851
DOI: 10.1021/acsnano.8b01266

Electron-driven and thermal chemistry during water-assisted purification of platinum nanomaterials generated by electron beam induced deposition

Author(s): Ziyan Warneke, Markus Rohdenburg, Jonas Warneke, Janina Kopyra, Petra Swiderek
Published in: Beilstein Journal of Nanotechnology, Issue 9, 2018, Page(s) 77-90, ISSN 2190-4286
DOI: 10.3762/bjnano.9.10

Electron Beam-Induced Surface Activation of Metal–Organic Framework HKUST-1: Unraveling the Underlying Chemistry

Author(s): Kai Ahlenhoff, Christian Preischl, Petra Swiderek, Hubertus Marbach
Published in: The Journal of Physical Chemistry C, Issue 122/46, 2018, Page(s) 26658-26670, ISSN 1932-7447
DOI: 10.1021/acs.jpcc.8b06226

Cisplatin as a Potential Platinum Focused Electron Beam Induced Deposition Precursor: NH 3 Ligands Enhance the Electron-Induced Removal of Chlorine

Author(s): Markus Rohdenburg, Petra Martinović, Kai Ahlenhoff, Sascha Koch, Daniel Emmrich, Armin Gölzhäuser, Petra Swiderek
Published in: The Journal of Physical Chemistry C, Issue 123/35, 2019, Page(s) 21774-21787, ISSN 1932-7447
DOI: 10.1021/acs.jpcc.9b05756

Mechanical Properties of 3D Nanostructures Obtained by Focused Electron/Ion Beam-Induced Deposition: A Review

Author(s): Ivo Utke, Johann Michler, Robert Winkler, Harald Plank
Published in: Micromachines, Issue 11/4, 2020, Page(s) 397, ISSN 2072-666X
DOI: 10.3390/mi11040397

Unraveling the role of photons and electrons upon their chemical interaction with photoresist during EUV exposure

Author(s): Yannick Vesters, Atish Rathore, Pieter Vanelderen, John Petersen, Danilo De Simone, Geert Vandenberghe, Ivan Pollentier
Published in: Advances in Patterning Materials and Processes XXXV, 2018, Page(s) 11
DOI: 10.1117/12.2299593