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Content archived on 2024-04-19

Mini-Environment Standardisation for IC Manufacturing

Objective

MESIC provides standards for the integration of mini-environments into IC manufacturing facilities. Starting from the existing standard for opening the bottom of a SMIF box, new standards will be created for:

- manual and automated handling of boxes
- box identification
- wafer transfer into minienvironment equipment
- standards for procurement, validation and acceptance
- standards for the control interfaces of mini-environment equipment subsystems.
- organic and inorganic contamination control.

Among the key activities planned, concepts will be published, questionnaires distributed and workshops scheduled to determine, define and promote a common agreement within the European IC industry. The results will be put into the standardisation tasks. As a final result, the standards will be entered into the SEMI (Semiconductor Equipment and Materials International) standardisation procedure to create a world-wide standard for the IC industry from the concepts that have been previously published and disseminated among the European IC industry.

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Coordinator

FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
EU contribution
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Address
Nobelstrasse 12
70569 STUTTGART
Germany

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Participants (3)