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Publications
The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication
Author(s): Victor Deinhart, Lisa-Marie Kern, Jan N. Kirchhof, Sabrina Juergensen, Joris Sturm, Enno Krauss, Thorsten Feichtner, Sviatoslav Kovalchuk, Michael Schneider, Dieter Engel, Bastian Pfau, Bert Hecht, Kirill I. Bolotin, Stephanie Reich and Katja Höflich
Published in: Beilstein Journal of Nanotechnology, Volume 12, 2021, Page(s) 304-318, ISSN 2190-4286
Publisher: Beilstein-Institut Zur Forderung der Chemischen Wissenschaften
DOI: 10.3762/bjnano.12.25