CORDIS
EU research results

CORDIS

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Mask Based Lithography for Fast, Large Scale Pattern Generation with Nanometer Resolution

Project information

Grant agreement ID: 863127

Status

Ongoing project

  • Start date

    1 January 2020

  • End date

    31 December 2023

Funded under:

H2020-EU.1.2.1.

  • Overall budget:

    € 3 356 511,75

  • EU contribution

    € 3 356 511,75

Coordinated by:

UNIVERSITETET I BERGEN

Norway

Project description

English EN

New nano patterning technique offers hope for making large scale patterns with individual molecules

The ability to pattern materials at ever-smaller sizes using photolithography is driving advances in nanotechnology. When the feature size of materials is reduced to the nanoscale, individual atoms and molecules can be manipulated to dramatically alter material properties. So far, the highest-resolution nanolithography can generate patterns down to 20 nm. Extreme ultraviolet lithography – a next-generation lithography technology – can deliver even smaller pattern sizes. However, the secondary electron blur from extreme-ultraviolet photons hinders the creation of single molecule patterns. The EU-funded Nanolace project will demonstrate a breakthrough nanolithography technique: Mask-based atom lithography. Two approaches will be pursued: Solid-state masks and optical masks. If successful the project will be the first to use Bose-einstein condensates for lithograpy and the first to demonstrate single-nanometer resolution mask based lithography, revolutionising the world of micro and quantum electronics.

Coordinator

UNIVERSITETET I BERGEN

Address

Museplassen 1
5020 Bergen

Norway

Activity type

Higher or Secondary Education Establishments

EU Contribution

€ 537 686,25

Participants (6)

THE PROVOST, FELLOWS, FOUNDATION SCHOLARS & THE OTHER MEMBERS OF BOARD OF THE COLLEGE OF THE HOLY & UNDIVIDED TRINITY OF QUEEN ELIZABETH NEAR DUBLIN

Ireland

EU Contribution

€ 445 567,50

THE UNIVERSITY OF BIRMINGHAM

United Kingdom

EU Contribution

€ 481 413

NORGES TEKNISK-NATURVITENSKAPELIGE UNIVERSITET NTNU

Norway

EU Contribution

€ 393 953,75

IDRYMA TECHNOLOGIAS KAI EREVNAS

Greece

EU Contribution

€ 899 125

IRRESISTIBLE MATERIALS LTD

United Kingdom

EU Contribution

€ 153 016,25

MB SCIENTIFIC AB

Sweden

EU Contribution

€ 445 750

Project information

Grant agreement ID: 863127

Status

Ongoing project

  • Start date

    1 January 2020

  • End date

    31 December 2023

Funded under:

H2020-EU.1.2.1.

  • Overall budget:

    € 3 356 511,75

  • EU contribution

    € 3 356 511,75

Coordinated by:

UNIVERSITETET I BERGEN

Norway