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Functional & Dynamic 3D Nano- MicroDevices by Direct Multi-Photon Lithography

Periodic Reporting for period 3 - 5D NanoPrinting (Functional & Dynamic 3D Nano- MicroDevices by Direct Multi-Photon Lithography)

Reporting period: 2023-03-01 to 2025-02-28

First prototype of simple MEMS accelerometer, direct fabricated by 2 photon lithography
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