Periodic Reporting for period 2 - 5D NanoPrinting (Functional & Dynamic 3D Nano- MicroDevices by Direct Multi-Photon Lithography)
Berichtszeitraum: 2021-09-01 bis 2023-02-28
In the 5DNanoPrinting project we aim to develop a novel and functional approach for the fast and inexpensive prototyping of functional 3D Microelectromechanical systems - MEMS. Comparable to the disruptive effect of 3D manufacturing technologies in the last decade, thanks to our approach we aim to set a novel gold standard for the fabrication of micro and nanotechnologies, which combine an unprecedented structural freedom with the possibility of employing a vast plethora of materials with different properties and characteristics. In doing so, the 5DNanoPrinting project aspire to produce innovative solutions to express the full potential of MEMS devices, a process whose development, despite the immense progress made in the past fifteen years, is still time-consuming and expensive.
New methodologies for 3D rapid prototyping can overcome these limitations, speeding up the design and validation process, but also broaden the scope of microfabrication to include structures and functionalities which are not achievable with standard methods. To achieve so, during the project, we are developing a multifunctional platform that enables the integration of arbitrary structures with sub-micrometric resolutions and (dynamic) functionalities.
Novel functional materials compatible with two-photon lithographic techniques (aka Direct Laser Writing, DLW) are currently being developed that comprise graded structural, patternable, conductive, and stimuli-responsive materials – which constitute the minimum set of requirements to create a complete functional MEMS. By combining these latter, with as well other established lithographic techniques and components, we already started to investigate the possibility of realizing working 3D-printed MEMS which can be interfaced with current technologies. The ambition of the 5D NanoPrinting is to become a novel gold standard for micro/nano-technologies, thus impacting on European scientific and industrial
From a market perspective general MEMS and NEMS applications are continuously growing: for 2018 it is expected that market value will reach 15 billions of dollars. Among others, the most successful MEMS market sectors are: inertial (accelerometer, gyroscope, magnetometer, IMU), environmental (pressure, temperature, humidity, particle, microphone) and optical (proximity, ambient light, multi spectral). Most of these market segment could be properly addressed by the 5D NanoPrinting technology.
New methodologies for 3D rapid prototyping can overcome these limitations, speeding up the design and validation process, but also broaden the scope of microfabrication to include structures and functionalities which are not achievable with standard methods. To achieve so, during the project, we are developing a multifunctional platform that enables the integration of arbitrary structures with sub-micrometric resolutions and (dynamic) functionalities.
Novel functional materials compatible with two-photon lithographic techniques (aka Direct Laser Writing, DLW) are currently being developed that comprise graded structural, patternable, conductive, and stimuli-responsive materials – which constitute the minimum set of requirements to create a complete functional MEMS. By combining these latter, with as well other established lithographic techniques and components, we already started to investigate the possibility of realizing working 3D-printed MEMS which can be interfaced with current technologies. The ambition of the 5D NanoPrinting is to become a novel gold standard for micro/nano-technologies, thus impacting on European scientific and industrial
From a market perspective general MEMS and NEMS applications are continuously growing: for 2018 it is expected that market value will reach 15 billions of dollars. Among others, the most successful MEMS market sectors are: inertial (accelerometer, gyroscope, magnetometer, IMU), environmental (pressure, temperature, humidity, particle, microphone) and optical (proximity, ambient light, multi spectral). Most of these market segment could be properly addressed by the 5D NanoPrinting technology.
The work carried out till now targeted three of the main specific objectives of the 5D NanoPrinting project:
I. Fabrication of a multi-photon, multi-parametric fabrication-testing system that will be used to assess functionality and run-time control of 2γ polymerization on our developed materials. The system will be able to simultaneously provide femtosecond pulsed beam (for two photon lithography), and additional stimuli in order to finely modulate materials properties at polymerization stage. At the moment, the system up and running. Optimization is in progress.
II. Development of a portfolio of new materials, suitable for two photon lithography and 3D polymerization with sub-micrometric resolution, having the following functionalities:
- Graded mechanical properties (materials that can be spatially modulated in terms of stiffness tensor).
Currently, we are investigating several different approaches, including synthetic formulations and nanocomposites.
- Conductivity (materials that can be shaped to provide conformal 3D electric patterns and connections).
Currently, we are developing different approaches for both electronic a ionic conductions.
- Mechanical responsiveness (for creating micro- nano-actuation components).
Currently, we are investigating the use of liquid crystalline elastomers aligned using several methods.
- Electrical responsiveness to mechanical stimuli for sensing.
We are currently studying materials with piezoresistive and piezoelectric capability, compatible with two photon approach.
III. Proof-of-concept functional MEMS printed via DLW. We fabricated a working accelerometer based on a 3D microprinted design. Moreover, we are investigating and developing novel techniques to integrate standard processes and devices with DLW.
I. Fabrication of a multi-photon, multi-parametric fabrication-testing system that will be used to assess functionality and run-time control of 2γ polymerization on our developed materials. The system will be able to simultaneously provide femtosecond pulsed beam (for two photon lithography), and additional stimuli in order to finely modulate materials properties at polymerization stage. At the moment, the system up and running. Optimization is in progress.
II. Development of a portfolio of new materials, suitable for two photon lithography and 3D polymerization with sub-micrometric resolution, having the following functionalities:
- Graded mechanical properties (materials that can be spatially modulated in terms of stiffness tensor).
Currently, we are investigating several different approaches, including synthetic formulations and nanocomposites.
- Conductivity (materials that can be shaped to provide conformal 3D electric patterns and connections).
Currently, we are developing different approaches for both electronic a ionic conductions.
- Mechanical responsiveness (for creating micro- nano-actuation components).
Currently, we are investigating the use of liquid crystalline elastomers aligned using several methods.
- Electrical responsiveness to mechanical stimuli for sensing.
We are currently studying materials with piezoresistive and piezoelectric capability, compatible with two photon approach.
III. Proof-of-concept functional MEMS printed via DLW. We fabricated a working accelerometer based on a 3D microprinted design. Moreover, we are investigating and developing novel techniques to integrate standard processes and devices with DLW.
The work carried out so far brought to the publication of 18 scientific papers and 1 deposited PCT patent on a new erasable material for DLW. The main concepts related to the technologies developed within the 5D NanoPrinting project have been presented during a specific open Tutorial meeting event, which presentations are available on the web site of the project.
Specifically, a significative progress beyond the state of the art has been reached in this initial working period on some of the materials developed. In particular, the aspect that has been yet addressed successfully are the following:
- Development of a new erasable material for DLW: the work on this specific material is now successfully concluded. This material formulation is completely new and can be used by DLV to build 3D structures with very high resolution; Moreover it can be removed with in very mild conditions. One patent related to this has been deposited and a scientific paper has been published.
- Development of new actuations materials based on aligned liquid crystal elastomer (LCE) Compatible 3D DLW. Different approaches advancing the state of the art of the field has been demonstrated. Two scientific paper on this topic have been published.
- Development 3D DLW patternable Ionogels for optical sensing of gases. In this case the fabrication of photonic crystal starting form different ionogel formulation has been demonstrated for the first time. The results have been published on a couple of scientific papers.
- A technique to create electric path on 3D DLW structure has been also proposed and validated on a significative demonstrative device. In particular, the technique has been used to built directly in two step (DLW plus metal evaporation) a simple but working monoaxial accelerometer, with piezoresistive transduction. The result has been presented to a conference and the related scientific paper on the proceeding of the same conference.
- A Technique for easy handling and conformal transfer transfer of 3D 2PP micro-structures has been developed. The results have been published on a published scientific paper.
- A demonstrative application of the technique of transfer of 3D 2PP micro-structures has been applied to implement THz meta-surfaces. The results have been published on a published scientific paper.
Further results advancing the state of the art are expected to be achieved in the very next future.
Specifically, a significative progress beyond the state of the art has been reached in this initial working period on some of the materials developed. In particular, the aspect that has been yet addressed successfully are the following:
- Development of a new erasable material for DLW: the work on this specific material is now successfully concluded. This material formulation is completely new and can be used by DLV to build 3D structures with very high resolution; Moreover it can be removed with in very mild conditions. One patent related to this has been deposited and a scientific paper has been published.
- Development of new actuations materials based on aligned liquid crystal elastomer (LCE) Compatible 3D DLW. Different approaches advancing the state of the art of the field has been demonstrated. Two scientific paper on this topic have been published.
- Development 3D DLW patternable Ionogels for optical sensing of gases. In this case the fabrication of photonic crystal starting form different ionogel formulation has been demonstrated for the first time. The results have been published on a couple of scientific papers.
- A technique to create electric path on 3D DLW structure has been also proposed and validated on a significative demonstrative device. In particular, the technique has been used to built directly in two step (DLW plus metal evaporation) a simple but working monoaxial accelerometer, with piezoresistive transduction. The result has been presented to a conference and the related scientific paper on the proceeding of the same conference.
- A Technique for easy handling and conformal transfer transfer of 3D 2PP micro-structures has been developed. The results have been published on a published scientific paper.
- A demonstrative application of the technique of transfer of 3D 2PP micro-structures has been applied to implement THz meta-surfaces. The results have been published on a published scientific paper.
Further results advancing the state of the art are expected to be achieved in the very next future.