Objective
The DISCS project has taken three main objectives :
1. to deposit diamond and silicon carbide thin films using a range of CVD technologies;
2. to use advanced manufacturing techniques to process the diamond and silicon carbide films, e.g. using plasmas and ion beams;
3. to fabricate prototype, advanced sensing structures in the carbide thin films.
Diamond films have been deposited using thermal filament and microwave chemical vapour deposition (CVD) technologies. Deposition onto substrates up to 50 mm in diameter has been demonstrated.
In addition multilayer films have been grown of undoped and doped films using boron precursor gases as the dopant carrier. Selected area deposition of the films has also been demonstrated, especially in diamond technology. These results demonstrate that it is sensible to consider the fabrication of sensing structures of doped films.
Downstream processing of the films has demonstrated that it is possible to reactive ion beam etch the structures required to give a very high quality structure definition. Metal contacts to the films have also been formed in order to make an initial assessment of the electrical properties of the as deposited and subsequently machined materials.
The performances of the films at high temperatures is under investigation. Laser Raman, resistivity, capacitance and X-ray measurements have all been undertaken at elevated temperatures. Depending on the technique being used, temperatures up to 850 C have been used to collect data. The results, thus far, indicate that the films are of high quality. There is evidence to suggest that the properties of the films are affected by temperature. However, above a minimum temperature of approximately 350 C, the properties remain stable and reproducible. There is evidence to suggest that this stability is connected with the movement of minority species, such as hydrogen, within the films.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences chemical sciences inorganic chemistry inorganic compounds
- engineering and technology materials engineering coating and films
- engineering and technology electrical engineering, electronic engineering, information engineering electronic engineering sensors
- natural sciences chemical sciences inorganic chemistry metalloids
- natural sciences physical sciences optics laser physics
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
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Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
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Coordinator
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.