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DEVELOPMENT OF THE LASER ABLATION DEPOSITION OF HIGH GRADE THIN FILM MATERIALS FOR APPLICATIONS IN MAGNETICS,MICRO-ELECTRONICS AND X-RAY OPTICS -ALADIN

Objectif

The aims are to develop a sound physical understanding of the process as applied to metallic and insulating compounds, and to exploit LAD for the preparation of a range of novel materials and multilayer structures for application in magnetics, microelectronics and X-ray optics.
Laser ablation deposition (LAD) has tremendous, but largely unrealised potential as a simple and versatile method of thin film preparation. This project aims to develop a sound physical understanding of the process as applied to metallic and insulating compounds, and to exploit LAD for the preparation of a range of novel materials and multilayer structures for application in magnetics, microelectronics and X-ray optics.
The nature and energy of the species evaporated in LAD, has been studied by use of CMA-QMS spectrometer. Particle filters for elimination of droplets ejected from the target during ablation have been developed. Epitaxial films have been grown of the yttrium cobalt(5) and yttrium nickel(5) compounds and layers of tungsten, niobium, yttrium and samarium. Diamond like carbon films exhibiting a long range crystalline order have been prepared. High quality epitaxial films of 1-2-3 superconductors have been prepared with yttrium, praseodymium and europium as well as bismuth strontium calcium copper oxide films doped with praseodymium and lithium. Off stoichiometric multilayers have been prepared of the bismuth superconductors interspaced with lead monoxide layers, with the aim of producing high critical temperature (Tc) superconductors without the need to perform annealing under lead vapour.

LAD is a rapidly developing method for thin film deposition which is particularly well suited for the preparation of compound thin films. Technical difficulties (high energies of evaporated species leading to interface mixing and resputtering and formation of droplets ejected from the target) have until now limited the development of LAD. A detailed assessment of LAD has been realised and a technique has been developed. In particular, a velocity selector to eliminate droplets has been designed and built. Also, 3 different types of model materials have been prepared, namely R2M17 intermetallic compounds, bismuth-based high critical temperature superconductors and diamond like carbon. Different types of materials have also been prepared to evaluate the versatility of the technique. The mechanisms involved in LAD have been examined experimentally and the laser target interactions have been modelled.

Studies on the nature of laser ablation have made a significant contribution to the understanding of the process. The laser ablation of metals has been clarified; just above the threshold for measurable ablation the removal rate is governed by the temperature dependence of the vapour pressure, and at higher fluence ablation via a laser produced plasma is the appropriate model. The highly energetic ions found in the plume are as consistent with the laser plasma ablation models. The much higher ablation rates found for ceramic materials can be understood in terms of the relatively long optical absorption depth leading to boiling of the directly heated region. The optical absorption processes leading to the production of ions in the plume are not yet determined, and deserve further investigation.
Laser ablation deposition (LAD) has tremendous, but largely unrealized potential as a simple and versatile method of thin film presentation. This project associates five groups with complementary experience in different aspects of LAD.

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CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
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