Fundamental physical chemistry of ultraprecision silicon etching tonanometre dimensions

Project Information

Grant agreement ID: BRPR970588

Start date 1 February 1998

End date 30 April 2001

Funded under

• Specific research and technological development programme in the field of industrial and materials technologies, 1994-1998

Total cost € 0,00

EU contribution € 0,00

Coordinated by

THE UNIVERSITY OF LIVERPOOL
United Kingdom

Other documents

• Fundamental physical chemistry of ultraprecision silicon etching to nanometer dimensions (FUPUSET)