The Creation of a Software Tool for the Resist Heating Effect Correction in Electron Beam Lithography on the Base of Experimental Investigation and Verification

Project Information

DAEDALUS

Grant agreement ID: CP94-991

Project closed

Start date 1 April 1995

End date 31 March 1997

Funded under

• Scientific and technological cooperation between the European Community and European non-member countries, 1992-

Total cost No data

EU contribution No data

Coordinated by

AISS GmbH
Germany

Objective

The objective of the project is to develop an advanced CAD tool for the correction of resist heating effects in electron beam lithography (EBL). This will allow designers to simulate and compensate for distortions due to the resist heating effects and thus enable the fabrication of microelectronics structures without distortions. The software tool will be designed for industrial application in the most advanced process of sub-micron microelectronics technology - variable shaped EBL.

The heating effect correction program will be integrated into the commercially available post-processor SiCat and the proximity correction tool PROXECCO enabling correction of both proximity and heating effects.

A physical model of the resist heating effect will be built for this purpose. The correctness of model and software will be proven by experimental verification.

Programme(s)

• IC-PECO/COPERNICUS - Scientific and technological cooperation between the European Community and European non-member countries, 1992-

Topic(s)

Data not available

Call for proposal

Data not available

Funding Scheme

CSC - Cost-sharing contracts

Coordinator

AISS GmbH

• EU contribution: No data
• Address: Gotzinger Straße 46 ; 81371 München ; Germany
• Total cost: No data

Participants (2)

Institute of Computer Systems

Slovakia

• EU contribution: No data
• Address: Bratislava
• Total cost: No data

SET-SERVIS

Russia

• EU contribution: No data
• Address: Moscow
• Total cost: No data