Objective
The objective of the project is to develop an advanced CAD tool for the correction of resist heating effects in electron beam lithography (EBL). This will allow designers to simulate and compensate for distortions due to the resist heating effects and thus enable the fabrication of microelectronics structures without distortions. The software tool will be designed for industrial application in the most advanced process of sub-micron microelectronics technology - variable shaped EBL.
The heating effect correction program will be integrated into the commercially available post-processor SiCat and the proximity correction tool PROXECCO enabling correction of both proximity and heating effects.
A physical model of the resist heating effect will be built for this purpose. The correctness of model and software will be proven by experimental verification.
Fields of science (EuroSciVoc)
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
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Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
81371 München
Germany
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.