Skip to main content
DeutschDE
European Commission logo print header
Inhalt archiviert am 2022-12-23

The Creation of a Software Tool for the Resist Heating Effect Correction in Electron Beam Lithography on the Base of Experimental Investigation and Verification

Ziel

The objective of the project is to develop an advanced CAD tool for the correction of resist heating effects in electron beam lithography (EBL). This will allow designers to simulate and compensate for distortions due to the resist heating effects and thus enable the fabrication of microelectronics structures without distortions. The software tool will be designed for industrial application in the most advanced process of sub-micron microelectronics technology - variable shaped EBL.

The heating effect correction program will be integrated into the commercially available post-processor SiCat and the proximity correction tool PROXECCO enabling correction of both proximity and heating effects.

A physical model of the resist heating effect will be built for this purpose. The correctness of model and software will be proven by experimental verification.

Programm/Programme

Thema/Themen

Data not available

Aufforderung zur Vorschlagseinreichung

Data not available

Finanzierungsplan

CSC - Cost-sharing contracts

Koordinator

AISS GmbH
EU-Beitrag
Keine Daten
Adresse
Gotzinger Straße 46
81371 München
Deutschland

Auf der Karte ansehen
Gesamtkosten
Keine Daten

Beteiligte (2)

Diese Seite teilen

Herunterladen

Letzte Aktualisierung: 20 Februar 1996

Mein Booklet

Permalink: https://cordis.europa.eu/project/id/CP94-991/de

European Union, 2024