Monitoring of trace alkoxides in crystal growth and epitaxy

Project Information

MONTAGE

Grant agreement ID: CR144391-BRE21138

Project closed

Start date 1 May 1994

End date 31 July 1994

Funded under

• Specific programme of research and technological development in the field of industrial and materials technologies - CRAFT -, 1990-1994

Total cost No data

EU contribution No data

Coordinated by

Epichem Ltd
United Kingdom

Objective

An urgent need exists for the development of a new monitoring technique for the highest possible purity gases and liquids used in metalorganic chemical vapor deposition (MOCVD). MOCVD techniques are used in the deposition of a variety of industrial materials, including II-VI and III-V compounds for optoelectronics and magnetooptics applications. Both the range of applications and the ultimate performance of materials made by MOCVD are limited by the lack of a sensitive in-situ and on-line monitoring techniques. Metalorganic compounds are often highly reactive towards atmospheric oxygen and water vapour, readily degrading to form oxygen-containing species, which cause undesirable contamination in the product material. Oxygen contamination can significantly degrade the performance of the materials grown. The main objectives of the proposers are to develop such a monitoring technique for precursor production and end-use in a coatings system, thereby achieving an order of magnitude improvement in the current state of the art. Demonstrations will be carried out at SME sites; the results of the project will be disseminated to a wide audience.
Furthermore, each proposer expects to gain considerable industrial benefits, including increased sales of higher purity metalorganics, increased sales of MOCVD equipment utilizing high purity alkyls and monitoring equipment, and the worldwide marketing of the infrared monitor to MOCVD research centres.

Fields of science (EuroSciVoc)

CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques.

• engineering and technology › materials engineering › crystals
• natural sciences › physical sciences › electromagnetism and electronics › optoelectronics
• engineering and technology › materials engineering › coating and films

You need to log in or register to use this function

Programme(s)

• FP3-CRAFT - Specific programme of research and technological development in the field of industrial and materials technologies - CRAFT -, 1990-1994

Topic(s)

• 1.4.4 - Optical materials

Call for proposal

Data not available

Funding Scheme

CSC - Cost-sharing contracts

Coordinator

Epichem Ltd

• EU contribution: No data
• Address: Power Road Bromborough ; L62 3QF Wirral ; United Kingdom
• Total cost: No data