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Flash lamp supported deposition of 3c-sic films

Objective

The growing SiC market requires low cost, high quality and large area SiC wafers due to its outstanding potential for microelectronical and biomedical applications at high temperatures and in harsh environments. Currently, the market is dominated by one US company CREE producing 4/6H-SiC wafers with high cost and low mobility. The FLASiC-project will develop a new process to produce epitaxial and bulk 3C-SiC on Si or SOI substrates. To take advantage of a higher mobility, larger size and lower costs of this new material the defect density has to be reduced by several orders of magnitude. This will be reached by high energy absorption at the heteroepitaxial interface using Flash Lamp Annealing in ms range. The development of basic features of a new SiC-wafer technology is expected as well as contributions to the physical properties of 3C-SiC and the theoretical understanding of the formation process. The success of this project will bring Europe to a leading position on the SiC market.

Funding Scheme

CSC - Cost-sharing contracts

Coordinator

RESEARCH CENTER ROSSENDORF
Address
Research Center Rossendorf
01314 Weissig - Dresden
Germany

Participants (12)

ARISTOTLE UNIVERSITY OF THESSALONIKI
Greece
Address
University Campus
54006 Thessaloniki
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
France
Address
Bd Du 11 Novembre 1918, 43
69622 Villeurbanne
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
France
Address
Rue Bernard Gregory, Sophia Antipolis
06560 Valbonne
CONSEJO SUPERIOR DE INVESTIGACIONES CIENTIFICAS
Spain
Address
Campus Universidad Autonoma De Barcelona
08193 Bellaterra
Epichem Ltd
United Kingdom
Address
Power Road Bromborough
L62 3QF Wirral
FHR - FENDLER, HENPSCH, RAENCH ANLAGENBAU GMBH
Germany
Address
41,Am Huegel 2
01458 Ottendorf - Okrilla
NANOPARC GMBH
Germany
Address
Bautzner Landstrasse 45
01454 Weissig - Dresden
NOVASIC S.A.
France
Address
Savoie Technolac - Arche Bèt.4
73375 Le Bourget Du Lac
TECHNICAL UNIVERSITY OF ILMENAU
Germany
Address
Gustav Kirchoff Strasse 1 (Kirchoffbau)
98684 Ilmenau
UNIVERSITE CLAUDE BERNARD LYON 1
France
Address
Boulevard Du 11 Novembre 1918, 43
69622 Villeurbanne
UNIVERSITE DE MONTPELLIER II - SCIENCES ET TECHNIQUES DU LANGUEDOC
France
Address
Place Eugène Bataillon
34095 Montpellier
University of Cambridge
United Kingdom
Address
Trumpington Street
CB2 1PZ Cambridge