Skip to main content
Ir a la página de inicio de la Comisión Europea (se abrirá en una nueva ventana)
español es
CORDIS - Resultados de investigaciones de la UE
CORDIS
Contenido archivado el 2024-05-27

Smart Chemical Gas Sensor System Fabricated in Low Cost CMOS Technology with Integrated Electronics and Hybrid Sensitive Layers

Objetivo

The objective of CMOSSens is to develop a completely novel generation of miniaturised hybrid gas sensor systems fabricated in industrial CMOS technology by the consortium. For the first time, driving circuitry, signal- processing electronics as well as a microcontroller will be integrated monolithically with the sensor array on chip. The array will be coated with drop-deposited nanocrystalline metal oxides as sensitive layers. Novel evaluation algorithms for signal processing and new packaging solutions or the sensor system will be implemented. Due to its unique characteristics (small size, low price, smart features, CMOS) the system will open up new markets, not considered for sensors yet.

Within CMOSSens, the system will be used in four key-applications: monitoring
(1) residual oil in compressed air
(2) food quality in refrigerators
(3) air quality, workplace safety and
(4) application in portable electronic noses.

Objectives:
CMOSSens objectives:
(a) to develop and to transfer to the industrial environment the know-how for production of a versatile, miniaturised, integrated chemical gas sensor system, and
(b) to use the sensor system in four defined novel applications of direct industrial interest, thus initiating a generation of innovative products with significant market potential (portable electronic nose, residual oil monitoring, food quality in refrigerators, air quality monitoring).

The scientific/technological objectives of CMOSSens include
(1) realisation of a micro hot plate array,
(2) integration of driving electronics on chip,
(3) integration of data preprocessing and A/D conversion units on chip,
(4) innovative technology for deposition of sensitive layer,
(5) implementation of smart features and on-chip microcontroller,
(6) development of novel operation features and evaluation algorithms,
(7) development of advanced packaging solutions and
(8) application specific additional features.

Work description:
An industry-dominated consortium of 9 partners with complementary expertise in the following fields has been formed:
(I) chemical sensors, integrated sensors, post-processing,
(II) sensor systems, electronic noses, and data evaluation algorithms,
(III) CMOS design and process technology,
(IV) deposition and characterization of the chemically sensitive layers,
(V) system level packaging including injection molding,
(VI) application and customer specific design and implementation,
(VII) system tests and reliability issues, and
(VIII) marketing, customer contacts, requirements and needs.

The technical work is organised in 8 work packages:
1. Specification,
2. Design,
3. Processing,
4. Characterisation,
5. Signal evaluation,
6. Application Test,
7. Exploitation, and
8. Management.

The project evolves in four sequential phases, each concluded by milestones and building on the preceding one. The four phases include:
(a) specification of the key applications as input for
(b) design, processing, characterisation of he system paralleled by the development of the signal evaluation tools, followed by
(c) application- and finally
(d) exploitation phase.

The integrated sensor system will rely on conductivity changes of a semiconductor upon gas absorption. To that end conductivity measurement configurations will be designed on arrays of CMOS micromachined (back-etching) heated membranes (microhotplates). Gas-sensitive nanocrystalline tin dioxide will be deposited on the membranes. For optimum cost-efficiency and reliability, the complete sensor chip will be realised in industrial CMOS technology. This allows for integrating the driving electronics and signal processing units on the same chip. Testing and characterisation are performed using prototypes. In close co-operation with the industry partners, the evaluation algorithms will be developed and then downloaded to the system. CMOSSens will provide novel monitoring and safety tools and promote IST objectives.

Palabras clave

Palabras clave del proyecto indicadas por el coordinador del proyecto. No confundir con la taxonomía EuroSciVoc (Ámbito científico).

Programa(s)

Programas de financiación plurianuales que definen las prioridades de la UE en materia de investigación e innovación.

Tema(s)

Las convocatorias de propuestas se dividen en temas. Un tema define una materia o área específica para la que los solicitantes pueden presentar propuestas. La descripción de un tema comprende su alcance específico y la repercusión prevista del proyecto financiado.

Convocatoria de propuestas

Procedimiento para invitar a los solicitantes a presentar propuestas de proyectos con el objetivo de obtener financiación de la UE.

Datos no disponibles

Régimen de financiación

Régimen de financiación (o «Tipo de acción») dentro de un programa con características comunes. Especifica: el alcance de lo que se financia; el porcentaje de reembolso; los criterios específicos de evaluación para optar a la financiación; y el uso de formas simplificadas de costes como los importes a tanto alzado.

CSC - Cost-sharing contracts

Coordinador

EBERHARD KARLS UNIVERSITAET TUEBINGEN
Aportación de la UE
Sin datos
Dirección
WILHELMSTRASSE 7
72074 TUEBINGEN
Alemania

Ver en el mapa

Coste total

Los costes totales en que ha incurrido esta organización para participar en el proyecto, incluidos los costes directos e indirectos. Este importe es un subconjunto del presupuesto total del proyecto.

Sin datos

Participantes (8)

Mi folleto 0 0