Skip to main content
Vai all'homepage della Commissione europea (si apre in una nuova finestra)
italiano it
CORDIS - Risultati della ricerca dell’UE
CORDIS
Contenuto archiviato il 2024-05-27

Smart Chemical Gas Sensor System Fabricated in Low Cost CMOS Technology with Integrated Electronics and Hybrid Sensitive Layers

Obiettivo

The objective of CMOSSens is to develop a completely novel generation of miniaturised hybrid gas sensor systems fabricated in industrial CMOS technology by the consortium. For the first time, driving circuitry, signal- processing electronics as well as a microcontroller will be integrated monolithically with the sensor array on chip. The array will be coated with drop-deposited nanocrystalline metal oxides as sensitive layers. Novel evaluation algorithms for signal processing and new packaging solutions or the sensor system will be implemented. Due to its unique characteristics (small size, low price, smart features, CMOS) the system will open up new markets, not considered for sensors yet.

Within CMOSSens, the system will be used in four key-applications: monitoring
(1) residual oil in compressed air
(2) food quality in refrigerators
(3) air quality, workplace safety and
(4) application in portable electronic noses.

Objectives:
CMOSSens objectives:
(a) to develop and to transfer to the industrial environment the know-how for production of a versatile, miniaturised, integrated chemical gas sensor system, and
(b) to use the sensor system in four defined novel applications of direct industrial interest, thus initiating a generation of innovative products with significant market potential (portable electronic nose, residual oil monitoring, food quality in refrigerators, air quality monitoring).

The scientific/technological objectives of CMOSSens include
(1) realisation of a micro hot plate array,
(2) integration of driving electronics on chip,
(3) integration of data preprocessing and A/D conversion units on chip,
(4) innovative technology for deposition of sensitive layer,
(5) implementation of smart features and on-chip microcontroller,
(6) development of novel operation features and evaluation algorithms,
(7) development of advanced packaging solutions and
(8) application specific additional features.

Work description:
An industry-dominated consortium of 9 partners with complementary expertise in the following fields has been formed:
(I) chemical sensors, integrated sensors, post-processing,
(II) sensor systems, electronic noses, and data evaluation algorithms,
(III) CMOS design and process technology,
(IV) deposition and characterization of the chemically sensitive layers,
(V) system level packaging including injection molding,
(VI) application and customer specific design and implementation,
(VII) system tests and reliability issues, and
(VIII) marketing, customer contacts, requirements and needs.

The technical work is organised in 8 work packages:
1. Specification,
2. Design,
3. Processing,
4. Characterisation,
5. Signal evaluation,
6. Application Test,
7. Exploitation, and
8. Management.

The project evolves in four sequential phases, each concluded by milestones and building on the preceding one. The four phases include:
(a) specification of the key applications as input for
(b) design, processing, characterisation of he system paralleled by the development of the signal evaluation tools, followed by
(c) application- and finally
(d) exploitation phase.

The integrated sensor system will rely on conductivity changes of a semiconductor upon gas absorption. To that end conductivity measurement configurations will be designed on arrays of CMOS micromachined (back-etching) heated membranes (microhotplates). Gas-sensitive nanocrystalline tin dioxide will be deposited on the membranes. For optimum cost-efficiency and reliability, the complete sensor chip will be realised in industrial CMOS technology. This allows for integrating the driving electronics and signal processing units on the same chip. Testing and characterisation are performed using prototypes. In close co-operation with the industry partners, the evaluation algorithms will be developed and then downloaded to the system. CMOSSens will provide novel monitoring and safety tools and promote IST objectives.

Parole chiave

Parole chiave del progetto, indicate dal coordinatore del progetto. Da non confondere con la tassonomia EuroSciVoc (campo scientifico).

Programma(i)

Programmi di finanziamento pluriennali che definiscono le priorità dell’UE in materia di ricerca e innovazione.

Argomento(i)

Gli inviti a presentare proposte sono suddivisi per argomenti. Un argomento definisce un’area o un tema specifico per il quale i candidati possono presentare proposte. La descrizione di un argomento comprende il suo ambito specifico e l’impatto previsto del progetto finanziato.

Invito a presentare proposte

Procedura per invitare i candidati a presentare proposte di progetti, con l’obiettivo di ricevere finanziamenti dall’UE.

Dati non disponibili

Meccanismo di finanziamento

Meccanismo di finanziamento (o «Tipo di azione») all’interno di un programma con caratteristiche comuni. Specifica: l’ambito di ciò che viene finanziato; il tasso di rimborso; i criteri di valutazione specifici per qualificarsi per il finanziamento; l’uso di forme semplificate di costi come gli importi forfettari.

CSC - Cost-sharing contracts

Coordinatore

EBERHARD KARLS UNIVERSITAET TUEBINGEN
Contributo UE
Nessun dato
Indirizzo
WILHELMSTRASSE 7
72074 TUEBINGEN
Germania

Mostra sulla mappa

Costo totale

I costi totali sostenuti dall’organizzazione per partecipare al progetto, compresi i costi diretti e indiretti. Questo importo è un sottoinsieme del bilancio complessivo del progetto.

Nessun dato

Partecipanti (8)

Il mio fascicolo 0 0