Objective
Vickers micro hardness measurements according to ISO standards are used extensively as a testing method in microelectronics fabrication and thin layer technology using indentations with diagonal lengths shorter than 2 um. Currently the primary measurement standards are based on optical methods and have an intrinsic uncertainty of about 0.5 um. The objective of this project is to apply the scanning tunnelling microscope (STM) technique to produce a new more precise method for the measurement of roughness in the range 1 nm < Ra < 0.5 um and the determination of micro-hardness.
The project, in which advanced image processing algorithms will also be developed to improve the quality of the indentation image, is expected to lead to the construction of an operating two stage prototype instruments and the associated software. This prototype will be tested individually by each partner. Comparison measurements will be undertaken to link the STM measurements to the conventional ones, to investigate whether the existing written standards can be transferred to the STM technique or new ones have to be considered.
Status:
The work is in progress.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences computer and information sciences software
- natural sciences physical sciences optics microscopy
- natural sciences physical sciences electromagnetism and electronics microelectronics
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Coordinator
Denmark
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