Objective
The main objective of this work was to develop and characterise high flux thermal energy beam sources of reactive atoms of scientific and technological interest. Atom beam sources of atomic hydrogen, oxygen, nitrogen and the halogens have been studied.
Measurements were concentrated on 3 types of source:
a 2.45 GHz microwave extended quarter wave cavity source;
a Slevin type radio frequency source;
a specially developed 2.45 GHz discharge source using a Lisitano coil to achieve the necessary power matching.
Diagnostics based on mass spectrometry and optimal spectroscopy have been used to characterise source performance in terms of measured dissociation fraction, beam density, source operating pressure and input power. The influences of different source cleaning procedures and of gas purity have also been investigated. Considerable effort has also gone into exploring the influence of types of glass or quartz used for discharge tube fabrication and the effect of cooling and extraction geometry.
A number of studies of specific collision processes involving hydrogen atoms, produced from the studied sources, have been carried out.
This project will be directed towards the development and characterisation of RF and microwave beam sources that are capable of producing higly dissociated beams of well defined H, D, O, N and halogen atoms over a wide range of beam density. Mass spectrometric and optical spectrometric techniques will be used to determine dissociation fractions beam profiles and identify metastable components.
Atom beam sources find application (1) in the investigation of fundamental atomic properties and (2) in the preparation and etching of semiconductor surfaces.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences physical sciences electromagnetism and electronics semiconductivity
- natural sciences chemical sciences inorganic chemistry halogens
- natural sciences mathematics pure mathematics geometry
- natural sciences chemical sciences analytical chemistry mass spectrometry
- natural sciences physical sciences optics spectroscopy
You need to log in or register to use this function
Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Data not available
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Data not available
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
BT7 1NN Belfast
United Kingdom
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.