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Scanning Electron-beam Nanofabrication for SEnsors

Objective

SENSE: Scanning Electron-beam Nanofabrication for SEnsors tackles a major bottleneck in electronic noses (eNoses), which rely on arrays of partially selective gas sensors. Current devices remain bulky and limited by the inability to integrate multiple distinct sensing materials on a single chip. SENSE introduces a direct-write approach for fabricating multichannel gas sensors using electron beam induced deposition (EBID). EBID enables local decomposition of adsorbed precursors with nanometre precision, allowing site-specific growth of nanoporous carbon-rich and graphene-like films, either pristine or doped, directly onto microelectrode arrays.

The project will (i) demonstrate graphitisation of organic and organometallic precursors into carbon-rich nanostructures with tailored composition, (ii) achieve precise site-specific integration of gas-sensitive materials onto commercial platforms, (iii) develop beam control and image-guided automation to ensure reproducibility, (iv) design and test multichannel sensors with diverse material compositions, and (v) establish a reproducible fabrication workflow anchored in advanced characterisation.

The methodology combines SEM-based deposition with in situ gas injection, substrate heating, and multi-technique feedback (Raman, FTIR, AFM-IR, XPS, CPEM). This platform enables programmable libraries of functionalised graphene-family materials on a single chip, eliminating masks and transfer steps.

Expected impacts include miniaturised, low-cost eNoses with improved sensitivity and selectivity across volatile organic compounds, and transferable material recipes for catalysis, energy storage, and photonics. The fellowship will strengthen the researcher’s expertise in nanofabrication, automation, and advanced microscopy, supporting their independent career in nanoscale materials engineering.

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Keywords

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Programme(s)

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Topic(s)

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Funding Scheme

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HORIZON-TMA-MSCA-PF-EF - HORIZON TMA MSCA Postdoctoral Fellowships - European Fellowships

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Call for proposal

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(opens in new window) HORIZON-WIDERA-2025-TALENTS-01

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Coordinator

VSB - TECHNICAL UNIVERSITY OF OSTRAVA
Net EU contribution

Net EU financial contribution. The sum of money that the participant receives, deducted by the EU contribution to its linked third party. It considers the distribution of the EU financial contribution between direct beneficiaries of the project and other types of participants, like third-party participants.

€ 191 918,16
Address
17 LISTOPADU 2172/15
708 00 OSTRAVA PORUBA
Czechia

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Region
Česko Praha Hlavní město Praha
Activity type
Higher or Secondary Education Establishments
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Total cost

The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.

No data

Partners (1)