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Scanning Electron-beam Nanofabrication for SEnsors

Project description

Writing gas sensing into the nanoscale

Accurate detection and discrimination of volatile gases remains a major challenge, as existing electronic sensing systems struggle to combine high selectivity, miniaturisation and integration of multiple sensing materials on a single chip. The EU-funded SENSE project will develop a direct-write nanofabrication platform based on electron beam induced deposition to advance electronic nose (eNose) technology. Overall, the project will enable nanometre-precise, site-specific growth of nanoporous carbon-rich and graphene-like films on microelectrode arrays to create multichannel gas sensors with tailored properties. It combines beam-controlled fabrication, image-guided automation and in situ processing, supported by advanced characterisation for reproducibility. This approach will deliver compact and selective eNoses for volatile organic compounds, with applications in catalysis, energy and photonics.

Objective

SENSE: Scanning Electron-beam Nanofabrication for SEnsors tackles a major bottleneck in electronic noses (eNoses), which rely on arrays of partially selective gas sensors. Current devices remain bulky and limited by the inability to integrate multiple distinct sensing materials on a single chip. SENSE introduces a direct-write approach for fabricating multichannel gas sensors using electron beam induced deposition (EBID). EBID enables local decomposition of adsorbed precursors with nanometre precision, allowing site-specific growth of nanoporous carbon-rich and graphene-like films, either pristine or doped, directly onto microelectrode arrays.

The project will (i) demonstrate graphitisation of organic and organometallic precursors into carbon-rich nanostructures with tailored composition, (ii) achieve precise site-specific integration of gas-sensitive materials onto commercial platforms, (iii) develop beam control and image-guided automation to ensure reproducibility, (iv) design and test multichannel sensors with diverse material compositions, and (v) establish a reproducible fabrication workflow anchored in advanced characterisation.

The methodology combines SEM-based deposition with in situ gas injection, substrate heating, and multi-technique feedback (Raman, FTIR, AFM-IR, XPS, CPEM). This platform enables programmable libraries of functionalised graphene-family materials on a single chip, eliminating masks and transfer steps.

Expected impacts include miniaturised, low-cost eNoses with improved sensitivity and selectivity across volatile organic compounds, and transferable material recipes for catalysis, energy storage, and photonics. The fellowship will strengthen the researcher’s expertise in nanofabrication, automation, and advanced microscopy, supporting their independent career in nanoscale materials engineering.

Fields of science (EuroSciVoc)

Keywords

Programme(s)

Topic(s)

Funding Scheme

HORIZON-TMA-MSCA-PF-EF - HORIZON TMA MSCA Postdoctoral Fellowships - European Fellowships

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Call for proposal

(opens in new window) HORIZON-WIDERA-2025-TALENTS-01

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Coordinator

VSB - TECHNICAL UNIVERSITY OF OSTRAVA
Net EU contribution
€ 191 918,16
Address
17 LISTOPADU 2172/15
708 00 OSTRAVA PORUBA
Czechia
Region
Česko Praha Hlavní město Praha
Activity type
Higher or Secondary Education Establishments
Links
Total cost
No data

Partners (1)