Objective
The STREP proposal Radical Innovation Maskless Nanolithography (RIMANA) aims to research and develop a key maskless nano-patterning technology for low to medium volume production, essential for the semiconductor industry and emerging nanotechnology industry.
RIMANA is driven by two global industrial needs:
- An ML2 tool for short run and low to medium volume leading edge device manufacturers (Logic, ASIC, Silicon Foundries)
- A fast Mask Writer for the leading edge high volume device manufacturers (MPU, DRAM, Logic)
Both global industrial needs are addressed by the proposed RIMANA project with the following overall S/T objectives and work plans:
- Concept and realisation of a new, highly innovative compact APS (Programmable Aperture Plate System), including high-speed electronics with the ability to generate a massive parallelisation of electron beams for the 32nm technology node and beyond
- Concept and realization of Data Path improvements to achieve higher data rates
- Design and generation of test benches to demonstrate sub-32nm node ML2 high throughput capabilities in resist
- Brainstorm of results with perspectives for potential industrial realisation
The key challenges will be to explore and develop essential elements for the massive parallelisation of electron-beams and electron-optics, retaining ultimate resolution down to the nanometre scale, while minimising throughput-resolution trade-offs.
The project will be carried out by a strong and diversified team from industry, academia and acclaimed European research institutes, under the leadership of IMS Nano-fabrication GmbH, an SME with extensive experience in cutting-edge charged particle nano-fabrication research and technology.
RIMANA is harmonised completely with the FP6 strategic objective IST NMP-3. In particular, RIMANA addresses the need for "maskless nano-patterning for low to medium volume production for the 32nm node and beyond".
Fields of science
Topic(s)
Data not availableCall for proposal
Data not availableFunding Scheme
STREP - Specific Targeted Research ProjectCoordinator
1020 WIEN
Austria