Reinforcing silicon research in Europe
A European platform for advanced silicon research and development (R&D) was the main aim of the project ‘Silicon technology access to research’ (STAR). The plan was to upgrade and extend the existing infrastructures of three European technology research institutes – IMEC, CEA/LETI and FhG-IISB. The cooperation of these institutes would offer a full complement of silicon research equipment to European scientists. The three STAR project partners have silicon processing facilities that can produce wafers conforming to the latest 300 mm forces. The STAR project succeeded in installing more than 50 new operational processing tools, extending the existing processing infrastructure. Furthermore, a system of wafer exchange was established, allowing laboratories at the various sites to work on the same components thus making advanced research more cost effective. Access to this so-called ‘distributed processing facility’ by the research community aims at helping scientists enhance their research and also collaborate on development programmes. Furthermore, the project facilitated state-of-the-art hands-on training for young researchers and the feasibility of moving around Europe to conduct research. Exploitation of the STAR project’s upgraded infrastructures will strengthen Europe’s role in important research fields related to advanced silicon processing, emerging devices and nanotechnology.
